Applied Materials, Inc.

Jatinder Sasan

Thorsten Kril

Michael Howells

Hemanth Konanur Nagendra

An electronic device manufacturing system that includes a process tool and a tool server coupled to the process tool and comprising a communication node and an evaluation system. The communication node is configured to obtain one or more attributes from an evaluation system and provide a monitoring device comprising a data collection plan that is based on the one or more attributes. The communication node is further configured to register the monitoring device with a process tool. The communication node is further configured to receive, from the process tool, data based on the data collection plan and send the received data to the evaluation system.

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San Jose, CA, United States of America

Jatinder Sasan