Nederlandse Organisatie Voor Toegepast-natuurwetenschappelijk Onderzoek Tno

Jasper Winters

Hamed Sadeghian Marnani

William Edward Crowcombe

Teunis Cornelis Van Den Dool

Geerten Frans Ijsbrand Kramer

Albert Dekker

Robert Snel

Jan Jacobus Benjamin Biemond

Lukas Kramer

Pieter Thijs Eendebak

Thomas Liebig

Wouter Andries Jonker

Wouter Oosterheert

Wietse Van Dijk

Gu Johanna Willemina Van Rhijn

Tim Bosch

A physical object processing system is described that includes a process station, a transport facility, an optical imaging system, an image sensor and data process facilities. The transport facility transports objects along the process station that performs processing steps to the object. The image sensor acquires a digital image from an optical image of the physical objects provided by the optical imaging system. The data process facilities in turn process the digital image to control the process station. The optical imaging system maps the optical image of the at least one physical object onto the image sensor at an at least substantially fixed position during a time-interval for acquiring the digital image.

Physical object processing system and method

The invention is directed at a method of positioning a carrier on a flat surface using an positioning member, wherein the carrier comprises an upper part and a base which are connected to each other such as to be arranged remote from each other, wherein the positioning member is arranged between the base and the upper part such that the base is located at an opposite side of the positioning member with respect to the upper part of the carrier, the upper part resting on the positioning member prior to placing of the carrier onto the flat surface, wherein the upper part comprises three engagement elements, and wherein the positioning member comprises a support surface for receiving the three engagement elements of the upper part, said support surface including a plurality of sockets forming a kinematic mount for said three engagement elements, wherein the base comprises three landing elements, each landing element being associated with a respective one of the three engagement elements, and the method comprising the steps of: operating the positioning member for moving the carrier relative to the flat surface in a direction parallel thereto such as to position the carrier above a landing position; performing an action of placing the carrier on the flat surface at the landing position, said action of placing comprising: moving the base towards the flat surface until at least one of said landing elements is in contact with the flat surface and an associated engagement element of said engagement elements is released from the kinematic mount; continue said moving of the base relative to the flat surface until all landing elements are in contact with the flat surface; and continue said action of placing the carrier until all engagement elements are released from the kinematic mount.

Method of positioning a carrier on a flat surface, and assembly of a carrier and a positioning member

A method of operating a scanning probe microscope, wherein a control loop is provided which is configured for controlling one or more feedback parameters of the scanning probe microscope. One or more system identification measurements are performed during operation of the control loop, wherein during the one or more system identification measurements an excitation signal with a plurality of frequency components is introduced in the control loop and a resulting response signal indicative of a cantilever displacement or a stage-sample distance between a sensor device and a sample is measured. A model response function is identified using said excitation signal and said resulting response signal, wherein one or more settings and/or input signals are adapted in the control loop based on the identified model response function. The scanning probe microscope is used for characterization of the sample using the adapted one or more settings and/or input signals.

Scanning probe microscope and a method for operating thereof

The invention is directed at a positioning arm for positioning of a scan head of a surface scanning measurement device&#x2014;such as a scanning probe microscopy device&#x2014;relative to a surface. The positioning arm comprises a base at a first end thereof for mounting the arm with the base to a static reference structure. The positioning arm further comprises a first and a second arm member extending from the base, the second arm member extending parallel to the first arm member. The arm comprises a bridge member at a second end thereof, connecting the first and the second arm members. The first and the second arm member are respectively connected to each one of said base and said bridge member by means of a hingeable connection. The positioning arm further comprises an actuator for inducing a relative displacement between the first and the second arm member in a longitudinal direction of said first and second arm member for swinging the second end of the positioning arm in a direction transverse to the lateral displacement. The bridge member comprises a support for supporting the scan head.

Positioning arm for and method of placing a scan head on a support surface

An optical coherence tomography microscopy apparatus () is presented for detecting a three-dimensional image of an optically translucent or reflective sample object (OS), the apparatus comprising an interferometric optical setup including a photo sensor unit (). A sense signal Si from the photo sensor unit () is detected using a detection reference signal. The detection reference signal is derived from a signal indicative for a relative displacement of the sample object (OS) with respect to a reference object.

Optical coherence tomography microscopy apparatus and method for detecting a three-dimensional image of an object

The invention is directed at a method of performing scanning probe microscopy on a substrate surface using a scanning probe microscopy system, the system including at least one probe head, the probe head comprising a probe tip arranged on a cantilever and a tip position detector for determining a position of the probe tip along a z-direction transverse to an image plane, the method comprising: positioning the at least one probe head relative to the substrate surface; moving the probe tip and the substrate surface relative to each other in one or more directions parallel to the image plane for scanning of the substrate surface with the probe tip; and determining the position of the probe tip with the tip position detector during said scanning for mapping nanostructures on the substrate surface; wherein said step of positioning is performed by placing the at least one probe head on a static carrier surface.

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's-Gravenhage, Netherlands

Jasper Winters