Asml Netherlands B.v.

Asml Holding N.v.

Asm Technology Singapore Pte Ltd

C.c.m. Beheer B.v.

Jasper Anne Frido Marikus Simons

Jan Van Eijk

Antonius Franciscus Johannes De Groot

Yang-Shan Huang

Theo Anjes Maria Ruijl

Ronald Maarten Schneider

Krijn Frederik Bustraan

Albert Brals

Arend-Jan Johan Beltman

Ronald Plak

Minkyu Kim

Ronald Josephus Maria Lamers

Timotheus Hubertus Christiaan Groothuijsen

A positioning table, for example for a wire bonder has first and second arms, each of said first and second arms being independently drivable linearly along a first axis, and a stage that is engaged with both the first and second arms. The stage engages with each of the first and second arms via a respective engagement mechanism such that the stage is movable both linearly along the first axis, and rotatable about a rotary axis coincident with a center-point of the stage, the rotary axis being orthogonal to the first axis. Each engagement mechanism is configured to permit a respective distance between the center-point of the stage and an end of each of the first and second arms to vary during movement of an arm along the first axis.

Y-theta table for semiconductor equipment

A positioning system for positioning an object. The positioning system includes a stage, a balance mass and an actuator system. The stage is for holding the object. The actuator system is arranged to drive the stage in a first direction while driving the balance mass in a second direction opposite to the first direction. The stage is moveable in the first direction in a movement range. When the stage is moving in the first direction and is at an end of the movement range, the positioning system is arranged to collide the stage frontally into the balance mass.

Positioning system and lithographic apparatus

A positioning assembly is provided with an endless loop conveyor belt for transporting an object and a first and second roller () arranged inside the endless loop. A first mounting part connected to a first end of the first roller () and a second mounting part connected to a second end of the first roller () are independently movable in a length direction of the conveyor with respect to the frame (). An actuator system is provided which includes a first lateral actuator () arranged to move at least a part of the first roller () in a direction parallel to the rotational axes () of the first roller (). The first roller () is longitudinally divided into at least two longitudinal segments. The first lateral actuator () moves at least one of the longitudinal segments parallel to the rotational axis () of the first roller ().

Belt conveyor with an actuator for moving the belt in a lateral direction

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Eindhoven, Netherlands

Jasper Anne Frido Marikus Simons