Kla Tencor Corporation

Kla-tencor Technologies Corporation

Other

Kla Instruments Corporation

Kla Corporation

Kla-tenor Corp.

Jason Z Lin

Richard Wallingford

Mark J Roulo

Krishnamurthy Bhaskar

Eliezer Rosengaus

Lawrence Robert Miller

John S Taylor

Paul T Russell

Kishore Bubna

Bin-Ming Ben Tsai

Hong Chen

Allen Park

Ellis Chang

Songnian Rong

Chetana Bhaskar

Xing Chu

David M W Evans

David M Evans

Jianfang Lin

Yung-Ho Alex Chuang

J Joseph Armstrong

Bin-Ming Benjamin Tsai

David Lee Brown

Ashok V Kulkarni

Kenong Wu

Subramanian Balakrishnan

Santosh Bhattacharyya

Michael John Van Riet

Chien-Huei (Adam) Chen

Wei Zhao

Chien-Huei Adam Chen

Sharon McCauley

Chris Maher

Stephanie Chen

Michal Kowalski

Barry Becker

Suryanarayana Tummala

Evgeni Shifrin

A natural ventilator is herein disclosed that is free of moving parts, wind-activated, rain-proof, and free of dust or smog infiltration. It is not only suitable to be a standalone natural ventilator, but is also advantageous to be used as an enhanced exhaust exit in a forced-air ventilation system, for such enclosed spaces or objects as buildings and vehicles needing air relief. The ventilator assembly has rainwater-proof shapes or fixtures that serve to defend the vent system, and the interior space being vented, against rainwater invasion, even if raindrop trajectory becomes highly oblique from vertical as driven by strong winds. It also includes shapes or fixtures to prevent fume condensation from drifting outward and staining the exterior of a building or vehicle, or the like, that is being vented.

Wall-mounted suction ventilator

This application discloses a wind pressure-driven air intake device for natural ventilation of zero power consumption. Such a device comprises multiple tunnels being arranged around a common central chamber, each having an inflow valve at its inner end connecting the central chamber and an outer end open to ambient airflow. The inflow valve allows only inward flow from a corresponding tunnel into the central chamber. The central chamber has an opening allowing airflow exit to a space to be ventilated. The device is capable of capturing ambient wind flow and wind pressure to be fed to the vented space regardless of wind flow direction towards the device, with no need for a powered air driver.

Wind pressure-driven air intake device

A natural ventilator is herein disclosed that is free of moving parts, wind-activated, rain-proof, and free of dust or smog infiltration. It is not only suitable to be a standalone natural ventilator, but is also advantageous to be used as an enhanced exhaust exit in a forced-air ventilation system, for such enclosed spaces or objects as buildings and vehicles. It can also be used as a suction generator that supplies so-called suction or negative pressure to help stabilize such building components as roof membranes by channeling the low pressure to their underside to balance the wind uplift above. The ventilator has an enhanced rainwater-proof method that serves to defend the vent system, and the space being vented, against rainwater invasion, even if raindrop trajectory becomes highly oblique from vertical as driven by strong winds.

Roof-mounted suction ventilator

Mixed-mode includes receiving inspection results including one or more images of a selected region of the wafer, the one or more images include one or more wafer die including a set of repeating blocks, the set of repeating blocks a set of repeating cells. In addition, mixed-mode inspection includes adjusting a pixel size of the one or more images to map each cell, block and die to an integer number of pixels. Further, mixed-mode inspection includes comparing a first wafer die to a second wafer die to identify an occurrence of one or more defects in the first or second wafer die, comparing a first block to a second block to identify an occurrence of one or more defects in the first or second blocks and comparing a first cell to a second cell to identify an occurrence of one or more defects in the first or second cells.

Method and system for mixed mode wafer inspection

One embodiment relates to an apparatus for detecting defects on a manufactured substrate. The apparatus includes an imaging tool arranged to obtain image frames from the manufactured substrate. The apparatus further includes a data processing system which includes computer-readable code configured to compute features for pixels in an image frame and divide the pixels in the image frame into feature-defined groups of pixels. The computer-readable code is further configured to select a feature-defined group, and generate a multi-dimensional feature distribution for the selected feature-defined group. Another embodiment relates to a method of detecting defects from a test images frame and multiple reference image frames. Other embodiments, aspects, and features are also disclosed.

Detection of defects embedded in noise for inspection in semiconductor manufacturing

One embodiment relates to a method of automatically inspecting multiple array regions () simultaneously using an imaging apparatus (). The method includes selecting (or) an optimal pixel size such that each array region in the multiple array regions has a grouped cell which is an integer number of pixels in size, and adjusting a pixel size of the imaging apparatus to be the selected optimal pixel size. Optimal pixel sizes within an available range of pixel sizes may be determined by finding () a largest common divider of cell sizes of the multiple array regions when the cell sizes are expressed in integers. Pre-set criteria may be applied to determine () which, if any, of the optimal pixel sizes are acceptable based on pre-set criteria. If none of the optimal pixel sizes are acceptable, then one of the array regions may be marked for digital interpolation (see). Other embodiments, aspects, and features are also disclosed.

Methods and apparatus for simultaneously inspecting multiple array regions having different pitches

An inspection system for detecting anomalies on a substrate. The inspection system has a sensor array for generating image data. A first high speed network is coupled to the sensor array and receives and communicates the image data. An array of process nodes is coupled to the first high speed network, and receives and processes the image data to produce anomaly reports. Each process node has an interface card coupled to the first high speed network, that receives the image data from the first high speed network and formats the image data according to a high speed interface bus protocol. The interface card sets a register indicating whether a predetermined amount of image data has been stored in a memory, and the process node reads the register to determine whether the predetermined amount of image data has been stored in the memory, and initiates image processing when the register indicates that the predetermined amount of image data has been stored in the memory.

Status polling

A method of inspecting an array having memory blocks and page breaks. The array is imaged, and the image is divided into sections. Sections that include the memory blocks are selected into a candidate image. Pixels within a boundary horizontal line of pixels are inspected to determine horizontal edges of the memory blocks. Pixels within a boundary vertical line of pixels are inspected to determine vertical edges of the memory blocks. An image of a first memory block is compared to an image of a second memory block to determine differences. The differences are flagged as potential memory block defects. Images of the page breaks are compared to determine differences, and the differences are flagged as potential page break defects.

Memory cell and page break inspection

Methods and systems for generating information to be used for selecting values for parameter(s) of a detection algorithm are provided. One method includes without user intervention performing a scan of an area of a wafer using an inspection system and default values for parameter(s) of a detection algorithm to detect defects on the wafer. The method also includes selecting a portion of the defects from results of the scan based on a predetermined maximum number of total defects to be used for selecting values for the parameter(s) of the detection algorithm. The method further includes storing information, which includes values for the parameter(s) of the detection algorithm determined for the defects in the portion. The information can be used to select the values for the parameter(s) of the detection algorithm to be used for the inspection recipe without performing an additional scan of the wafer subsequent to the scan.

Methods and systems for generating information to be used for selecting values for one or more parameters of a detection algorithm

An inspection system for detecting anomalies on a substrate. A first network is coupled to a sensor array and communicates data. Process nodes are coupled to the first network, and process the data to produce reports. Each process node includes memory sufficient to buffer the data until it can process the data. Each process node has an interface card that formats the data for a high speed interface bus that is coupled to the interface card. A computer receives and processes the data to produce the report. A second network receives the reports. A job manager is coupled to the second network, receives the reports, and sends information to the process nodes to coordinate processing of the data.

Memory load balancing

An inspection image analysis system. At least one image processing computer is configured to receive and analyze at least one portion of an image. At least one test computer is configured to receive at least one common portion of the image also received by the at least one image processing computer, and to analyze the at least one common portion, using equivalent image processes as the corresponding at least one image processing computer. A job manager is configured to assign the common portion and to configure the corresponding image processing computer and the test computer to run equivalent image processes.

Mirror node process verification

Methods and systems for binning defects detected on a specimen are provided. One method includes comparing a test image to reference images. The test image includes an image of one or more patterned features formed on the specimen proximate to a defect detected on the specimen. The reference images include images of one or more patterned features associated with different regions of interest within a device being formed on the specimen. If the one or more patterned features of the test image match the one or more patterned features of one of the reference images, the method includes assigning the defect to a bin corresponding to the region of interest associated with the reference image.

Methods and systems for binning defects detected on a specimen

An inspection system. The inspection system has a sensor for generating data. A first network is coupled to the sensor and communicates the data. An array of nodes is coupled to the first network, and processes the data to produce reports. Each node has an interface coupled to the first network, and formats the data according to protocol. A bus is coupled to the interface A computer is coupled to the bus, and process the data according to an algorithm, to produce the report. The array of nodes is coupled to the first network in a daisy chain topology, and each node within a column of nodes receives common data with other nodes within the column. A second network is coupled to the nodes the second network, and receives the anomaly reports from the nodes and sends information to the nodes to coordinate processing of the data.

Daisy chained topology

Growing community of inventors

Saratoga, CA, United States of America

Jason Z Lin