University of Colorado

Drs Network & Imaging Systems, LLC

Jason M Gray

Steven McClellan George

George Dee Skidmore

Victor M Bright

Joseph J Brown

Nathan Thomas Eigenfeld

The present invention relates to novel nano- and micro-electromechanical devices and novel methods of preparing them. In one aspect, the invention includes methods of preparing a nanodevice. In certain embodiments, the methods comprise coating a polymer layer with a first at least one thin solid material layer using atomic layer deposition (ALD), thus forming an ALD-generated layer. In other embodiments, the methods comprise patterning the first at least one thin solid material layer to form a nanodevice. In yet other embodiments, the methods comprise releasing the nanodevice from the polymer layer.

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Hillsboro, OR, United States of America

Jason M Gray