Canon Kabushiki Kaisha

Jason Battin

Craig William Cone

Niyaz Khusnatdinov

James W Irving

Logan L Simpson

Christopher Ellis Jones

Wei Zhang

Steven Wayne Burns

Antoine Dellinger

Hiroyuki Kondo

Roger R Wenzel

One embodiment is a method that includes generating drop pattern information. The method may comprise receiving pattern information. The pattern information may include one or both of: a substrate pattern of a representative substrate; and a template pattern of a representative template. The method may further comprise receiving offset information about a particular substrate that is representative of a measured state of the particular substrate relative to a reference state. The drop pattern information may represent a plurality of positions to place droplets of formable material on the particular substrate. The method may further comprise outputting the drop pattern information that is representative of the formable material that fills a volume between the template and the particular substrate that is in the measured state and the formable material does not spread into a border region at an edge of the particular substrate.

Methods of generating drop patterns, systems for shaping films with the drop pattern, and methods of manufacturing an article with the drop pattern

A method of cleaning a dispenser including a faceplate, comprises emitting light over the surface of the faceplate across the width of the faceplate, measuring an intensity of the light at a plurality of points on the surface of the faceplate after the light has passed over the width, determining, based on the measured light intensity, whether an amount of accumulated formable material on the faceplate is greater than a predetermined value, and in a case that the amount of accumulated formable material is greater than a predetermined value, imparting a suction force on the surface of the faceplate using the vacuum at a distance from the faceplate to remove at least a portion of the accumulated formable material from the surface of the faceplate.

Nano-fabrication system with cleaning system for cleaning a faceplate of a dispenser and method of cleaning the faceplate

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Pflugerville, TX, United States of America

Jason Battin