Average Co-Inventor Count = 3.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Lam Research Corporation (1 from 3,768 patents)
1 patent:
1. 8624210 - Ozone plenum as UV shutter or tunable UV filter for cleaning semiconductor substrates