Mks Instruments, Inc.

Jaroslaw Wojciech Pisera

Paul D Lucas

Junhua Ding

Gordon Hill

Scott Benedict

David Brian Chamberlain

Robert Krmpotich

A pulse gas delivery system for delivering a sequence of pulses of prescribed amounts of gases to a process tool, comprises: (a) a plurality of channels, each including (i) a gas delivery chamber; (ii) an inlet valve connected so as to control gas flowing into the corresponding gas delivery chamber; and (iii) an outlet valve connected so as to control the amount of gas flowing out of the corresponding gas delivery chamber; and (b) a dedicated multiple channel controller configured so as to control the inlet and outlet valves of each of the channels so that pulses of gases in prescribed amounts can be provided to the process tool in a predetermined sequence in accordance with a pulse gas delivery process.

Method and apparatus for multiple-channel pulse gas delivery system

A valve assembly comprises: a valve body including a passageway through which a first gas can be transmitted through the valve assembly; a valve flow control element movable relative to the valve body between an opened position wherein flow through the passageway is at a maximum flow, and a closed position wherein flow through the passageway is at a minimum flow, the valve flow control element is shaped so that a control gap is provided between the valve body and valve flow control element through which the first gas can flow, and the dimensions of the control gap vary depending on the position of the valve flow control element relative to the valve body; and a gas injector arrangement for selectively injecting a second gas into the control gap when the valve assembly is used to control the flow of the first gas through the passageway. The injection of the second gas when the valve flow control element is at or near its closed position helps minimize condensate being deposited on the valve flow control element, as well as reduce the closed conductance of the valve.

Fluid control valves

A butterfly valve comprises: a body including a valve opening; and a flapper rotatably mounted about a rotation axis so as to be movable relative to the valve opening. The flapper is rotatable at least 180&#xb0; about the rotation axis so that the flapper is movable to at least one fully opened position, at least one fully closed position 90&#xb0; apart from the fully opened position, and a third position, either fully opened or fully closed, 180&#xb0; from the other like position. In one embodiment the flapper is rotatable at least 360&#xb0; about the rotation axis so that the flapper is movable to each of two opened positions 180&#xb0; apart, and two closed positions 180&#xb0; apart from each other and 90&#xb0; and 270&#xb0; apart from each of the fully opened positions. The valve can be easily calibrated and controlled, and cleaned to extend the useful service life between cleanings.

Butterfly valve and system employing same and method for using same field

A valve assembly including a housing having a flow path extending to an outlet and a valve seat in the flow path and around the outlet, a slide plate located in the housing and movable transversely to a longitudinal axis of the flow path between a closed position, in which the slide plate is in contact with the valve seat and blocks flow through the flow path, and an opened position, in which the slide plate allows flow through the flow path, and wherein at least one of the slide plate and the valve seat includes at least one passageway for providing a predetermined amount of conductance between the slide plate and the valve seat when the slide plate is in the closed position.

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Boulder, CO, United States of America

Jaroslaw Wojciech Pisera