Berkin B.v.

Jarno Groenesteijn

Remco John Wiegerink

Joost Conrad Lötters

Wouter Sparreboom

Theodorus Simon Josef Lammerink

Dannis Michel Brouwer

Robert Anton Brookhuis

Remco Gerardus Petrus Sanders

Maarten Sytze Groen

Meint Jelle De Boer

Henk-Willem Veltkamp

Egbert Jan Van Der Wouden

Miguel A Rodriguez Olguin

Mahdieh Yariesbouei

Qihui Yu

Jack Herman Van Putten

Esken Meutstege

Joost Conrad LÖTTERS

The invention relates to a microelectromechanical system (MEMS) component or microfluidic component comprising a free-hanging or free-standing microchannel (), as well as methods for manufacturing such a microchannel, as well as a flow sensor, e.g. a thermal flow sensor or a Coriolis flow sensor, pressure sensor or multi-parameter sensor, valve, pump or microheater, comprising such a microelectromechanical system component or microfluidic component. The MEMS component allows to increase the flow range and/or decrease the pressure drop of for instance a micro Coriolis mass flow meter by increasing the channel diameter, while maintaining its advantages.

Microelectromechanical system component or a microfluidic component comprising a free-hanging or free-standing microchannel

The invention relates to a flow measurement system for determining a flow of a medium, comprising a Coriolis flow sensor, a thermal flow sensor and a processing unit connected thereto. According to the invention, the processing unit is arranged for determining, based on the output signals of both the Coriolis flow sensor and the thermal sensor, at least one of the thermal conductivity and the specific heat capacity of a medium in the flow measurement system. The invention further relates to a method of determining at least one of the thermal conductivity and the specific heat capacity of a medium.

Flow measurement system and method for determining at least one property of a medium

The invention relates to a Coriolis flow sensor, comprising at least a Coriolis-tube, wherein the flow sensor comprises an excitation element for causing the tube to oscillate, as well as a detection element for detecting at least a measure of displacements of parts of the tube during operation. In some embodiments, the detection element comprises two detection elements that are positioned on both sides of the Coriolis tube, wherein the detection elements partly overlap each other.

Coriolis flow sensor having two detection elements partly overlapping the excitation axis and arranged on opposite sides of the flow tube

The invention relates to a fluid flow device (), comprising a system chip () having a substrate (), a flow channel () defined within said substrate, and a sensor unit () connected to said flow channel for determining a property of a fluid in said flow channel. Furthermore, a valve unit () is provided within said substrate, for regulating fluid flow through said flow channel. The valve unit comprises a valve chamber () defined within said substrate, and a valve member () that is movably arranged within the valve chamber. The flow channel has a connection channel part () defined within said substrate (), wherein said connection channel part is connected to said valve unit. Further, control means connected to said valve unit and said sensor unit are provided. The control means are arranged for controlling said valve unit based on signals obtained by said sensor unit.

Fluid flow device, comprising a valve unit, as well as method of manufacturing the same

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Ruurlo, Netherlands

Jarno Groenesteijn