Inficon Gmbh

Teknologian Tutkimuskeskus Vtt

Teknologian Tutkimuskeskus Vtt Oy

Spectral Engines Oy

Jarkko Antila

Heikki Saari

Martin Wüest

Per Björkman

Christer Holmlund

Urs Wälchli

Hansjakob Hanselmann

Jussi Mäkynen

Uula Kantojärvi

Martti Blomberg

Jussi Tenhunen

Felix Mullis

Rami Mannila

Anna Rissanen

Dietmar Bertsch

Walter Christian Berner

Oskar Untermarzoner

Tapani Antila

Gaétan Duplain

Jyrki Ollila

Tove Manselin

Mikko Tuohiniemi

Altti AKUJÄRVI

Uula KANTOJÄRVI

According to an example aspect of the present invention, there is provided a method for analysing a chemical composition of a target, the method comprising placing an electrically tunable Fabry-Perot interferometer in a path of radiation emitted by a radiation source, and detecting the radiation, which has passed the Fabry-Perot interferometer and which has passed or was reflected by the target, by means of a detector, and wherein detection is made such that multiple pass bands are allowed to be detected simultaneously.

Method and system for analysing a chemical composition of a target using a Fabry-Perot interferometer

A method for determining spectral calibration data (&#x3bb;(S), S(&#x3bb;)) of a Fabry-Perot interferometer () comprises:

Method for stabilizing a spectrometer using single spectral notch

A device and a method for optical measurement of a target, wherein the target is irradiated with radiation beam () and a measurement beam () is received from the target and detected. Commonly used absorbance, reflectance and fluorescence measurements do not provide adequate information in e.g. measuring small contents of sulphur compounds. The present solution provides a new Raman spectrometer which is suitable for mass applications. A target is activated with pulses of a laser diode (). The Raman signatures are measured and integrated successively with a point detector (). A Fabry-Perot interferometer () on the measurement path is successively controlled into corresponding pass bands. While high spectral resolution or range is not required it is possible to use small-sized and low cost components.

Device and method for optical measurement of a target

The invention relates to a Fabry-Perot interferometer and a method for producing the same. More specifically, the invention relates to Fabry-Perot interferometers which are controllable with one or several actuators, such as piezoelectric, electrostrictive or flexoelectric actuators. In prior art technology there is a problem to achieve a sufficiently small and uniform gap between mirrors. In the present invention an intermediate structure () is used between a mirror and an actuator or between two mirrors. The method of production also includes measuring the width distribution of the gap in several phases, and providing pre-actuation of actuators.

Fabry-perot interferometer and a method for producing the same with decreased bending

A method for producing a mirror plate for a Fabry-Perot interferometer includes providing a base slab, which includes a substrate coated with a reflective multilayer coating, forming one or more intermediate layers on the base slab such that the lowermost intermediate layer substantially consists of silica, and such that the multilayer coating is at least partially covered by the lowermost intermediate layer, forming one or more capacitive sensor electrodes by depositing conductive material on top of the intermediate layers, and removing material of the lowermost intermediate layer by etching in order to form an exposed aperture portion of the multilayer coating.

Method for producing a mirror plate for Fabry-Perot interferometer, and a mirror plate produced by the method

An imaging spectrometer includes a Fabry-Perot interferometer and an image sensor having color-sensitive pixels. The interferometer has a first transmission peak and a second transmission peak (PEAK2). A method calibrating the spectrometer includes providing first calibration light, which has a narrow spectral peak, obtaining first detector signal values from the image sensor by coupling the first calibration light into the spectrometer when the reference spectral peak is near a first spectral position, obtaining second detector signal values from the image sensor by coupling the first calibration light into the spectrometer when the reference spectral peak is near a second spectral position, providing second calibration light, which has a broad bandwidth, and obtaining third detector signal values from the image sensor by coupling the second calibration light into the spectrometer.

Method for determining calibration parameters for a spectrometer

The invention relates to controllable Fabry-Perot interferometers which are produced with micromechanical (MEMS) technology. The prior art interferometers have a temperature drift which causes inaccuracy and requirement for complicated packaging. According to the invention the interferometer arrangement has both an electrically tuneable interferometer and a reference interferometer on the same substrate. The temperature drift is measured with the reference interferometer and this information is used for compensating the measurement with the tuneable interferometer. The measurement accuracy and stability can thus be improved and requirements for packaging are lighter.

Micromechanical tunable Fabry-Perot interferometer arrangement and a method for producing the same

A pressure measuring cell has a first housing body and a membrane arranged proximate the housing body, both of ceramic. The membrane has a peripheral edge joined to the first housing body to create a reference pressure chamber. A second housing body made of ceramic material is opposite the membrane and is joined to the peripheral edge of the membrane, the second housing body together with the membrane forming a measurement pressure chamber. The second housing body has a port for connecting the pressure measuring cell to a medium to be measured. The first housing body, the second housing body and the membrane are tightly connected along the peripheral edge of the membrane in a central area of the first housing body a hole is formed, reaching through the first housing body and at least in the central region of the membrane and opposite the hole a surface of the membrane is formed as a first optically reflective area. An optical fiber is arranged and tightly fixed within the hole for feeding light onto the surface of the membrane. The end of the fiber reaches at least the surface of the first housing body and is formed as a second reflective optical area linking the surface so that between the fiber end and the reflection area an optical cavity is present which forms a measuring section for determining the level of deflection of the membrane and which is part of a Fabry-Perot Interferometer.

Optical interferometric pressure sensor

A diaphragm pressure measuring cell arrangement has a housing body at least partly made of sapphire material and a planar sapphire diaphragm with a peripheral edge joined by a first edge seal to the housing body to form a reference vacuum chamber. An outer surface of the diaphragm is exposed to a medium to be measured. A ceramic supporting body is attached to the back side of the housing body by sealing glass and includes a surface area overhanging that surrounds the housing body to form a first sealing surface. A tubular sensor casing incorporates the measuring cell for mounted the ceramic support body, the casing including an inside second surrounding sealing surface corresponding to the first sealing surface. A metal ring seal is between the sealing surfaces and a pressing member presses sealing surfaces together.

Diaphragm pressure measuring cell arrangement

A manufacturing method for a vacuum measuring cell provides first and second AlOceramic or sapphire housing bodies on opposite sides of an AlOceramic or sapphire membrane sealed to the bodies at its opposite peripheral edges. A reference vacuum chamber and a measuring vacuum chamber are on opposite sides of the membrane. An optical transparent window is provided in the first housing body and an optically reflective material is provided on a central region of the membrane. A lens is above the optical transparent window for optically linking to the optically reflective material on the membrane and an optical fiber outside the reference vacuum chamber and at a distance from the optical transparent window feeds light through the lens and window and in and out onto the optically reflective material on the membrane so that the level of membrane deflection is detected by a Fabry-Perot Interferometer.

Optical interferometric pressure sensor manufacturing method

A vacuum measuring cell has a first housing body and a membrane, both of AlOceramic or sapphire. The membrane is planar with a peripheral edge joined by a first seal to the first housing body to form a reference vacuum chamber. A second housing body of AlOceramic or sapphire opposite the membrane, is joined to the peripheral edge of the membrane by a second seal to form a measurement vacuum chamber. A port connects the vacuum measuring cell to a medium to be measured. At least in the central area of the first housing body, an optical transparent window is formed and at least the central region of the membrane has an optically reflective surface. Outside the reference vacuum chamber, in opposition to and at a distance from the window, an optical fibre is arranged for feeding in and out light onto the surface of the membrane.

Growing community of inventors

Helsinki, Finland

Jarkko Antila