Samsung Electronics Co., Ltd.

Janghwi Lee

Tae Hyun Kim

Sungho Jang

Jungchul Lee

Seongkeun Cho

Jinseob Kim

Minhwan Seo

Sangwoo Bae

Gwangsik Park

Akinori Okubo

Wondon Joo

Daehoon Han

Jiyoung Chu

Provided is a hyperspectral imaging (HSI) apparatus. The HSI apparatus includes: a first slit plate configured to introduce an output beam; a first aspherical mirror configured to reflect the introduced output beam; a first grating having a planar reflective surface, the first grating configured to generate a plurality of first split beams by splitting the output beam after being reflected by the first aspherical mirror; and a first camera configured to detect the plurality of first split beams.

Hyperspectral imaging (HSI) apparatus and inspection apparatus including the same

An optical test system includes a stage region to accommodate an object to be tested, a first incident optical system which changes a first polarization state of a first light beam to a second polarization state and provide the first light beam in the second polarization state to the stage region in a first direction at a first incident angle which is not a right angle, a second incident optical system which changes a third polarization state of a second light beam to a fourth polarization state and inputs the second light beam in the fourth polarization state to the stage region in a second direction at a second incident angle which is not a right angle, and a main optical system to detect a first reflected light beam reflected from the stage region at a first reflection angle different from the first and second incident.

Optical test system and method, and method of manufacturing semiconductor device by using the optical test system and method

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Suwon-si, South Korea

Janghwi Lee