Semes Co., Ltd.

Samsung Electronics Co., Ltd.

Jang Jin Lee

Pil Kyun Heo

Joon Ho Won

Jin Yeong Sung

Min Woo Kim

Ji Hwan Park

Hae-Won Choi

Seung Min Shin

Ki Hoon Choi

Anton Koriakin

Kun Tack Lee

Sang Jin Park

Tae Hee Kim

Eung Su Kim

Hae Won Choi

Koriakin Anton

The inventive concept provides a method for treating a substrate. The method for treating a substrate comprises: a pressurization step for increasing a pressure of an inner space of a chamber by supplying a treating fluid to the inner space, after taking the substrate into the inner space; a flow step for generating a flow of the treating fluid by combination of supplying and discharging the treating fluid to and from the inner space; and a depressurization step of decreasing the pressure of the inner space by discharging the treating fluid from the inner space, and wherein the pressurization step comprises: a bottom side supply process for increasing the pressure of the inner space by supplying the treating fluid to a backside of the substrate taken into the inner space; and a top side supply process of increasing the pressure of the inner space by supplying the treating fluid to a top side of the substrate taken into the inner space.

Method and apparatus for treating a substrate

An apparatus and method for treating a substrate are provided. The apparatus includes at least one first process chamber configured to supply a developer onto the substrate; at least one second process chamber configured to treat the substrate using a supercritical fluid; a transfer chamber configured to transfer the substrate from the at least one first process chamber to the at least one second process chamber, while the developer supplied in the at least one first process chamber remains on the substrate; and a temperature and humidity control system configured to manage temperature and humidity of the transfer chamber by supplying a first gas of constant temperature and humidity into the transfer chamber.

Apparatus and method for treating substrate including process chambers and transfer chamber

Growing community of inventors

Hwaseong-si, South Korea

Jang Jin Lee