Samsung Electronics Co., Ltd.

Jang-ho Park

Jae-Kwan Park

Byung-jun Hwang

Nam-su Lim

So-wi Jin

Dong-hwa Kwak

Dong-Hwa Kwak

Jin-Ho Kim

Sang-Yong Park

Su-Jin Ahn

Yoon-Moon Park

Jue-Hwang Sim

A NAND flash memory device includes a plurality of continuous conductors disposed on a common level of a multilayer substrate, the plurality of continuous conductors including respective conductive lines extending in parallel along a first direction, respective contact pads disposed at ends of the respective conductive lines and respective conductive dummy lines extending in parallel from the contact pads along a second direction.

Methods of manufacturing NAND flash memory devices

Semiconductor devices having wiring with contact pads and dummy lines

Nonvolatile memory devices that utilize dummy word line segments to inhibit dishing during fabrication

NAND flash memory devices having wiring with integrally-formed contact pads and dummy lines and methods of manufacturing the same

Patterns are formed in a semiconductor device by defining a lower layer that includes a first region and a second region on a semiconductor substrate, forming first patterns with a first pitch that extend to the first and second regions, forming second patterns with a second pitch in the second region that are alternately arranged with the first patterns, forming a space insulating layer that covers the first and second patterns and comprises gap regions that are alternately arranged with the first patterns so as to correspond with the second patterns, forming third patterns that correspond to the second patterns in the gap regions, respectively, etching the space insulating layer between the first and second patterns and between the first and third patterns, such that the space insulating layer remains between the second patterns and the third patterns, and etching the lower layer using the first, second, and third patterns and the remaining space insulating layer between the second and third patterns as an etching mask.

Methods of forming a semiconductor device that allow patterns in different regions that have different pitches to be connected

Growing community of inventors

Gyeonggi-do, South Korea

Jang-ho Park