Average Co-Inventor Count = 6.54
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Samsung Electronics Co., Ltd. (3 from 131,214 patents)
2. Sungkyunkwan University (2 from 1,238 patents)
3. Fine Semitech Co., Ltd. (2 from 2 patents)
4. Fine Semitech Corp. (1 from 6 patents)
3 patents:
1. 10394117 - Pellicle film including graphite-containing thin film for extreme ultraviolet lithography
2. 10001700 - Pellicle film including graphite-containing thin film for extreme ultraviolet lithography
3. 8404405 - Pellicle frame, pellicle, lithography apparatus, and method of fabricating the pellicle frame