Sandia Corporation

National Technology & Engineering Solutions of Sandia, LLC

Janet Nguyen

Michael David Henry

Roy H Olsson

Matt Eichenfield

Travis Ryan Young

James E Stevens

Karl Douglas Greth

A micromechanical resonator is disclosed. The resonator includes a resonant micromechanical element. A film of annealable material deposited on a facial surface of the element. In one instance, the resonance of the element can be adjusting by using a feedback loop to control annealing of the deposited film.

Trimming method for microresonators and microresonators made thereby

A micromechanical resonator is disclosed. The resonator includes a resonant micromechanical element. A film of annealable material can be deposited on a facial surface of the element. The resonance of the element can be tuned by annealing the deposited film. Also disclosed are methods of applying a film on a resonator and annealing the film, thereby tuning one or more resonant properties of the resonator.

Tuning method for microresonators and microresonators made thereby

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Wilmington, MA, United States of America

Janet Nguyen