Leybold Systems Gmbh

J&uuml;rgen Meinel

Harro Hagedorn

Hans-Georg Lotz

Hermann Kloberdanz

G&uuml;nter Br&auml;uer

Michael K&ouml;nig

Alfons Z&ouml;ller

Jochen Schneider

G&ouml;tz Teschner

In an apparatus for the coating of substrates in a vacuum with rotatable substrate carriers (,) and with a loading and an unloading station (,or,), two vacuum chambers (,) are provided with several coating stations (,or,to,), directly next to one another, wherein a rotatable transport arm (,or,) is accommodated in each of the two chambers (,), and the transport planes of the two transport arms (,) are aligned with one another. In the separation area of the two chambers (,), an air lock is provided with a corresponding transfer apparatus (,) with two transport arms (,), whose rotary plate (,) is provided with substrate storage unit (,) and projects about halfway into one chamber (,) and halfway into the other chamber (,), wherein one chamber (,) has both the loading as well as the unloading station (,or,).

Apparatus for the coating of substrates in a vacuum chamber

Growing community of inventors

Langen, Germany

Jürgen Meinel

Growing community of inventors

Langen, Germany

J&uuml;rgen Meinel

Jürgen Meinel