Leybold Systems Gmbh

J&uuml;rgen Henrich

Klaus Michael

Helmut Grimm

Gert R&ouml;dling

Tomas Baumecker

J&uuml;rgen Ulrich

Michael Liehr

Friedrich Anderle

Wilfried Dicken

Klaus Nauenburg

Heinrich Gr&uuml;nwald

Rudolf Beckmann

In an air lock for continuous introduction into and/or removal of workpieces from spaces ( ) separated atmospherically, the individual substrates ( ) are transported through a transfer channel ( ). At least one lock chamber ( ) serving to accommodate the substrates ( ) is arranged movably in the transfer channel ( ). During the substrate transport in the transfer channel ( ), the lock chamber ( ) is atmospherically separated both from the exterior ( ) having normal pressure and from the coating chamber ( ). The air lock ( ) includes a carrousel lock which has a carrousel housing ( ) and a lock chamber wheel ( ). On the periphery in the lock chamber wheel ( ) individual lock chambers ( ) are provided, in which the workpieces ( ) to be brought into the chamber to be loaded ( ) are inserted freely accessible on the normal pressure side. By turning the lock chamber wheel ( ), the substrates ( ) in the lock chambers ( ) are transported from the coating station &lsqb;sic; loading station&rsqb; (A) to the transfer station (B) into the treatment chamber ( ) diametrically opposite the normal pressure side. In the transfer station (B) the substrates ( ) are removed from the transfer channels ( ) by means of a transfer device ( &prime;) and are available for further treatment in the treatment chamber ( ).

Air lock for introducing substrates to and/or removing them from a treatment chamber

A process and device is shown for coating the delineating surfaces of a hollow object, preferably a hollow object having at least one sealable opening, by means of plasma coating, via the action of plasma on the delineating surface of the hollow object that is to be coated.

Process for coating plastic containers or glass containers by means of a PCVD coating process

In an air lock for continuous introduction into and/or removal of workpieces from spaces (,) separated atmospherically, the individual substrates (,) are transported through a transfer channel (,). At least one lock chamber (,) serving to accommodate the substrates (,) is arranged movably in the transfer channel (,). During the substrate transport in the transfer channel (,), the lock chamber (,) is atmospherically separated both from the exterior (,) having normal pressure and from the coating chamber (,). The air lock (,) includes a carrousel lock which has a carrousel housing (,) and a lock chamber wheel (,). On the periphery in the lock chamber wheel (,) individual lock chambers (,) are provided, in which the workpieces (,) to be brought into the chamber to be loaded (,) are inserted freely accessible on the normal pressure side. By turning the lock chamber wheel (,), the substrates (,) in the lock chambers (,) are transported from the coating station (A) to the transfer station (B) into the treatment chamber (,) diametrically opposite the normal pressure side. In the transfer station (B) the substrates (,) are removed from the transfer channels (,) by means of a transfer device (,&prime;) and are available for further treatment in the treatment chamber (,). The treatment chamber (,) includes, for instance, of a vacuum-coating chamber in which the workpieces (,) as the substrates to be coated are coated by a vacuum-supported coating method.

Growing community of inventors

Limeshain, Germany

Jürgen Henrich

Growing community of inventors

Limeshain, Germany

J&uuml;rgen Henrich

Jürgen Henrich