Robert Boschgmbh

Jan Waldmann

Jochen Reinmuth

Franz Laermer

Thomas Rocznik

Rolf Scheben

Seow Yuen Yee

Christian Peters

Denis Gugel

Rudy Eid

Ralf Boessendoerfer

Benny Pekka Herzogenrath

Mohak Shah

Monika Koster

Zubin Abraham

Michael Jaax

Fabian Henrici

A micromechanical sensor. The sensor includes a substrate, a cap element situated on the substrate, at least one seismic mass that is deflectable orthogonal to the cap element, an internal pressure that is lower by a defined amount relative to the surrounding environment prevailing inside a cavity, and a compensating element designed to provide a homogenization of a temperature gradient field in the cavity during operation of the micromechanical sensor.

Micromechanical sensor

A micromechanical sensor system that includes a mass that is deflectable at least in the z direction. A stop element having an elastic design is situated on the mass on at least one of the sides oriented in the z direction, via a connection element.

Micromechanical sensor system

A micromechanical z-inertial sensor, having a movable MEMS structure developed in a micromechanical function layer; a torsion spring connected to the movable MEMS structure; and a spring device connected to the torsion spring, the spring device being developed to hamper a deflection of the torsion spring orthogonal to a sensing direction of the MEMS structure in a defined manner.

Micromechanical z-inertial sensor

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Reutlingen, Germany

Jan Waldmann