Bayer Intellectual Property Gmbh

Krohne Messtechnik Gmbh

Bayer Technology Services Gmbh

Jan-Peter Hauschild

Jörg Müller

Eric Wapelhorst

Joerg Mueller

A device and/or method mount and affix a microchannel plate in a micro system. The device and/or method has at least one conductive spring structure, formed to accept a microchannel plate, for aligning, fixing and making electrical contact with the microchannel plate. The device and/or method also has at least one stop against which the microchannel plate is pushed or pressed when affixed by at least one conductive spring structure, wherein the at least one conductive spring structure and the at least one stop are being applied on a non-conductive substrate.

Device for self-aligning and affixing of a microchannel plate in a micro-system and method the same

A mass spectrometer with an ionization chamber with a feed channel for a gas to be examined, including an electron source (d, n) for ionizing the gas to be examined, electrodes (c) for accelerating the ionizing electrons, electrodes (g, h, j, m) for the mass-dependent separation of the ions by acceleration/deceleration thereof, a detector (l) for the separated ions, a wiring with metallic conductors. The components are arranged on a plane nonconductive substrate (), having an energy filter (k) for the ions, the energy filter being embodied as a 90&#xb0; sector, is constructed in completely planar fashion. The ionization chamber (b), the electrodes (g, h, j, m) for accelerating the electrons and ions, the detector (l) for the ions and the energy filter (k) are produced by a single step of photolithography and etching of a doped semiconductor die () applied to the substrate () and the wiring () and the abovementioned parts are covered by a second flat nonconductive substrate ().

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Hamburg, Germany

Jan-Peter Hauschild