Siemens Aktiengesellschaft

Freescale Semiconductor,inc.

Jenoptik Ldt Gmbh

Fibercheck Gmbh

Technische Universitat Chemnitz

Jan Mehner

Yizhen Lin

Dirk Scheibner

Thomas Gessner

Michael Naumann

Jens Makuth

Christian Kaufmann

Wolfram Doetzel

Ramon Hahn

Marco Dienel

Steffen Kurt

Alexander Sorger

An inertial sensor () includes a drive system () configured to oscillate a drive mass () within a plane () that is substantially parallel to a surface () of a substrate (). The drive system () includes first and second drive units () having fixed fingers () interleaved with movable fingers () of the drive mass (). At least one of the drive units () is located on each side () of the drive mass (). Likewise, at least one of the drive units () is located on each side () of the drive mass (). The drive units () are driven in phase opposition to the drive units () so that a levitation force () generated by the drive units () compensates for, or at least partially suppresses, a levitation force () generated by the drive units ().

Inertial sensor and method of levitation effect compensation

The invention relates to a micromechanical sensor having at least two spring-mass damper oscillators. The micromechanical sensor has a first spring-mass-damper oscillating system with a first resonant frequency and a second spring-mass-damper oscillating system with a second resonant frequency which is lower than the first resonant frequency. The invention also relates to a method for detection and/or measurement of oscillations by means of a sensor such as this, and to a method for production of a micromechanical sensor such as this. The first and the second spring-mass-damper oscillating systems have electrodes which oscillate in a measurement direction about electrode rest positions with electrode deflections which are equal to or proportional to deflections of the spring-mass-damper oscillators. The systems are coupled to one another by means of at least one electrostatic field, which acts on the electrodes, forming at least one capacitance with the capacitance being governed by at least one electrode area and by at least one electrode separation and/or an electrode coverage.

Micromechanical sensor having a bandpass characteristic

A vibration measuring system for the frequency-selective measuring of especially low-frequency vibrations relevant in the area of automation and motive power engineering is disclosed which allows an economical vibration analysis of frequencies in the range of from 0 to 1 kHz. For this purpose, a broad-band transmitting structure which is directly induced by the excitation signal to be determined is coupled to a receiving structure by an electrostatic or inductive force. This force coupling brings about an amplitude modulation of a carrier signal inducing the receiving structure. The spectrum of the amplitude-modulated carrier signal can then be used to extract the actual excitation signal, e.g. by suitably choosing the frequency of the carrier signal.

Vibration measuring system

A resonance scanner, wherein a frame (), a drive plate (), a mirror () and torsion springs () form an actuator part (), said drive plate () being attached within the frame () by two first torsion springs () such that the drive plate () can oscillate about a common first axis of torsion () of both torsion springs (), said mirror () being attached within the drive plate () by two second torsion springs () such that the mirror () can oscillate about a common second axis of torsion () of both torsion springs (), and said first axis of torsion () and said second axis of torsion () being parallel to each other; wherein, further, only the frame () of the actuator part () is attached to side walls () of a box-shaped stator part (), a drive means (stator electrodesor coil) is arranged at a bottom () of the stator part () only in the region of the geometrical surface area of the drive plate () and said bottom () has a recess () in the region of the geometrical surface area of the mirror (), which recess () is dimensioned at least such that a maximum mechanical deflection of the mirror () is not limited by the bottom (), said drive means (stator electrodesor coil) applying a force only directly to the drive plate () and said force following a periodic function, whose period is tuned to the eigenfrequency of the mirror (), which differs from the eigenfrequency of the drive plate ().

Resonance scanner

Growing community of inventors

Neukirchen, Germany

Jan Mehner