Monolithic 3d Inc.

Xilinx, Inc.

North American Philips Corp, Signetics Division

Jan Lodewijk De Jong

Zvi Or-Bach

Deepak Chandra Sekar

Brian Cronquist

Israel Beinglass

Zeev Wurman

Zicheng Gary Ling

Isreal Beinglass

Steven P Young

Austin H Lesea

Michael J Hart

Martin L Voogel

James Karp

Raymond C Pang

Kevin T Look

Shahin Toutounchi

Boon Yong Ang

Carl H Carmichael

Joseph J Fabula

Susan Xuan Nguyen

Hsung Jai Im

Patrick J Quinn

Sunhom Paak

Daniel Gitlin

Xin X Wu

Paul G Lim

Jongheon Jeong

Steven M Baier

Leon Ly Nguyen

Serhii Tumakha

Jonathan J Ho

Amit Ghia

Jacob G DeGroot

Michael L Hart

A semiconductor device, including: a first layer including monocrystalline material and first transistors, the first transistors overlaid by a first isolation layer; a second layer including second transistors and overlaying the first isolation layer, the second transistors including a monocrystalline material; where the second layer includes at least one through layer via to provide connection between at least one of the second transistors and at least one of the first transistors, where the at least one through layer via has a diameter of less than 200 nm; a first set of external connections underlying the first layer to connect the device to external devices; and a second set of external connections overlying the second layer to connect the device to external devices.

3D semiconductor device and structure

A semiconductor device, including: a first layer including first transistors, the first transistors are interconnected by at least one metal layer including copper or aluminum; a second layer including second transistors, the first layer is overlaid by the second layer, where the second layer includes a plurality of through layer vias having a diameter of less than 200 nm, where the second transistors include a source contact, the source contact including a silicide, and where the silicide has a sheet resistance of less than 15 ohm/sq.

System comprising a semiconductor device and structure

A semiconductor device, including: a first layer including first transistors; an interconnection layer overlying the first transistors, the interconnection layer providing interconnection for the first transistors; a bonding layer overlying the interconnection layer; a second layer overlying the bonding layer; and a carrier substrate for the transferring of the second layer, where the second layer includes at least one through second layer via, where the at least one through second layer via has a diameter of less than 100 nm, where the second layer includes a plurality of second transistors, and where the second layer is transferred from a donor wafer.

A semiconductor device includes a first mono-crystallized layer including first transistors, and a first metal layer forming at least a portion of connections between the first transistors; and a second layer including second transistors, the second transistors including mono-crystalline material, the second layer overlying the first metal layer, wherein the first metal layer includes aluminum or copper, and wherein the second layer is less than one micron in thickness and includes logic cells.

Monolithic three-dimensional semiconductor device and structure

A method of manufacturing semiconductor devices: providing a first device including a first die and second die, where the first die is diced from a first wafer, the second die is diced from a second wafer, the first die is connected to the second die using at least one through-silicon-via; providing a second device including a third die and fourth die, where the third die is diced from a third wafer, the fourth die is diced from a fourth wafer, the third die is connected to the fourth die using at least one through-silicon-via; where the first die includes a first functionality and the third die includes a second functionality, the first functionality is different than the second functionality, a majority of the masks used for processing the first wafer and the third wafer are the same; and the second die size is substantially different than the fourth die size.

Method for fabrication of a semiconductor device and structure

A method to construct configurable systems, the method including: providing a first configurable system including a first die and a second die, where the connections between the first die and the second die include through-silicon-via ('TSV'), where the first die is diced from a first wafer using first dice lines; providing a second configurable system including a third die and a fourth die, where the connections between the third die and the fourth die include through-silicon-via ('TSV'), where the third die is diced from a third wafer using third dice lines; and processing the first wafer and the third wafer utilizing at least 20 masks that are the same; where the first dice lines are substantially different than the third dice lines, and where the second die includes a configurable I/O to connect the first configurable system to external devices.

Method for fabrication of configurable systems

A semiconductor device including: a first mono-crystal layer and a second mono-crystal layer and at least one conductive layer in-between; where the at least one conductive layer includes a first conductive layer overlaying a second conductive layer overlying a third conductive layer, and where the second conductive layer having a predetermined second layer current carrying capacity greater than the current carrying capacity of the first conductive layer, and the second conductive layer current carrying capacity being greater than the current carrying capacity of the third conductive layer.

Semiconductor device and structure

A method to fabricate a semiconductor device, including the sequence of: implanting one or more regions on a semiconductor wafer forming a doped layer; performing a first transfer of the doped layer onto a carrier; and then performing a second transfer of the doped layer from the carrier to a target wafer; and then etching said one or more regions of the doped layer to form transistors on the doped layer.

Method of fabricating a semiconductor device and structure

A method for fabricating a device, the method including: providing a first layer including first transistors wherein the first transistors include mono-crystalline semiconductor and first alignment marks; overlaying a second semiconductor layer over the first layer, wherein the second layer includes second transistors, the second transistors include mono-crystalline semiconductor and are configured to be memory cells, at least one of the memory cells include a floating body region configured to be charged to a level indicative of a state of the memory cell, and fabricating the second transistors includes alignment to the first alignment marks.

A semiconductor device including a first single crystal layer with first transistors and a first alignment mark; at least one metal layer overlying the first single crystal layer, wherein the at least one metal layer includes copper or aluminum; and a second layer including activated dopant regions, the second layer overlying the at least one metal layer, wherein the second layer includes second transistors, wherein the second transistors are processed aligned to the first alignment mark with less than 100 nm alignment error, and the second transistors include mono-crystal, horizontally-oriented transistors.

A semiconductor device comprising: a first single crystal silicon layer comprising first transistors, first alignment mark, and at least one metal layer overlying said first single crystal silicon layer, wherein said at least one metal layer comprises copper or aluminum more than other materials; a second layer overlying said at least one metal layer, said second layer comprising second transistors, second alignment mark, and a through via through said second layer, wherein said through via is a part of a connection path between said first transistors and said second transistors, wherein alignment of said through via is based on said first alignment mark and said second alignment mark and effected by a distance between said first alignment mark and said second alignment mark.

Systems and methods are disclosed for fabricating a semiconductor device, includes implanting one or more regions on a semiconductor wafer; performing a layer transfer onto a carrier; and transferring from said carrier to a target wafer.

A semiconductor device including a first layer including first transistors, wherein first logic circuits are constructed by the first transistors, and wherein the first logic circuits include at least one of Inverter, NAND gate, or NOR gate; and a second layer overlaying said first layer, the second layer including second transistors, wherein second logic circuits are constructed by the second transistors; wherein each logic circuit in the first logic circuits has inputs and at least one first output, the inputs are connected to the second logic circuits; wherein each logic circuit in the second logic circuits has a second output, and wherein the first transistors include first selectors adapted to selectively replace at least one of the at least one first outputs with at least one of the second outputs.

A method for fabrication of 3D semiconductor devices utilizing a layer transfer and steps for forming transistors on top of a pre-fabricated semiconductor device comprising transistors formed on crystallized semiconductor base layer and metal layer for the transistors interconnections and insulation layer. The advantage of this approach is reduction of the over all metal length used to interconnect the various transistors.

A system includes a semiconductor device. The semiconductor device includes a first semiconductor layer comprising first transistors, wherein the first transistors are interconnected by at least one metal layer comprising aluminum or copper. The second mono-crystallized semiconductor layer includes second transistors and is overlaying the at least one metal layer, wherein the second mono-crystallized semiconductor layer is less than 150 nm in thickness, and at least one of the second transistors is an N-type transistor and at least one of the second transistors is a P-type transistor.

Growing community of inventors

Cupertino, CA, United States of America

Jan Lodewijk De Jong