Taiwan Semiconductor Manufacturing Comp. Ltd.

Jan-Liang Yang

Hui-Chun Lee

Chun-Wei Liao

Sheng-Wen Jiang

Peng-Ting Lee

A method of manufacturing a semiconductor device includes forming a photoresist layer including a photoresist composition over a substrate. The photoresist layer is selectively exposed to actinic radiation. The photoresist layer is heated after selectively exposing the photoresist layer to actinic radiation. During the heating, the photoresist layer is exposed to an ambient of greater than 45% relative humidity. The photoresist layer is developed after the heating to form a pattern in the photoresist layer.

Method of manufacturing a semiconductor device and semiconductor device manufacturing tool

A method for manufacturing a semiconductor device includes forming a forming a photoresist layer over a semiconductor substrate and selectively exposing the photoresist layer to actinic radiation. After selectively exposing the photoresist layer to actinic radiation, storing the semiconductor substrate in a semiconductor substrate container under an ambient of extreme dry clean air or inert gas. The method also includes after the storing the semiconductor substrate, performing a first heating of the photoresist layer.

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Taichung, Taiwan

Jan-Liang Yang