Asml Netherlands B.v.

Berliner Glas Kgaa Herbert Kubatz Gmbh & Co.

Jan Ingwersen

David Kieven

A method for producing a component from two plates, which are electrically isolating, at least one is optically transparent, and between them at least one planar conductor section and at least one isolator section are formed, comprises bonding the plates at mutually facing bonding faces, wherein a metal layer is arranged therebetween, and processing the metal layer by local heating using laser radiation such that the metal layer is converted into the at least one isolator section in a part region, and the at least one conductor section is formed adjacent thereto. To form the at least one isolator section, the light path of the laser radiation and the component are moved relative to each other to convert the metal layer into the at least one isolator section over a line or area. Bonding faces of metallic bond layers are polished. The plates are bonded by atomic diffusion bonding.

Method for production of a component by atomic diffusion bonding

A method for processing a metal film () embedded in a carrier () includes the step of heating the metal film () in such a way that the metal film () is transformed in a subregion into at least one insulator section (). The metal film () is preferably locally heated by laser radiation (). Also described is a component () which is produced by the method and includes an electrostatic clamp, a drive mechanism which is adapted for moving a workpiece under the action of electrical fields, a resistor element or a display device, for example.

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Berlin, Germany

Jan Ingwersen