Globalfoundries Inc.

Globalfoundries U.S. Inc.

Jan Höntschel

Peter Baars

George Robert Mulfinger

Ryan W Sporer

Rick J Carter

Hans-Jürgen Thees

Peter Javorka

Michael Ronald Otto

Steven Langdon

Ruchil Kumar Jain

Dominik M Kleimaier

Felix Holzmüller

Maximilian Jüttner

Structures for a field-effect transistor and methods of forming a structure for a field-effect transistor. The structure comprises a silicon-on-insulator substrate including a semiconductor substrate, a dielectric layer on the semiconductor substrate, and a semiconductor layer on the dielectric layer. The structure further comprises a gate electrode on the semiconductor layer. The gate electrode comprises a single-crystal semiconductor material. The structure further comprises a spacer structure including a first portion that overlaps with a side surface of the dielectric layer and a second portion that overlaps with a portion of the semiconductor substrate adjacent to the side surface of the dielectric layer.

Structures for a field-effect transistor that include a spacer structure

A method of forming matched PFET/NFET spacers with differential widths for SG and EG structures and a method of forming differential width nitride spacers for SG NFET and SG PFET structures and PFET/NFET EG structures and respective resulting devices are provided. Embodiments include providing PFET SG and EG structures and NFET SG and EG structures; forming a first nitride layer over the substrate; forming an oxide liner; forming a second nitride layer on sidewalls of the PFET and NFET EG structures; removing horizontal portions of the first nitride layer and the oxide liner over the PFET SG and EG structures; forming RSD structures on opposite sides of each of the PFET SG and EG structures; removing horizontal portions of the first nitride layer and the oxide liner over the NFET SG and EG structures; and forming RSD structures on opposite sides of each of the NFET SG and EG structures.

Differential SG/EG spacer integration with equivalent NFET/PFET spacer widths and dual raised source drain expitaxial silicon and triple-nitride spacer integration enabling high-voltage EG device on FDSOI

Differential SG/EG spacer integration with equivalent NFET/PFET spacer widths and dial raised source drain expitaxial silicon and triple-nitride spacer integration enabling high-voltage EG device on FDSOI

The present disclosure generally relates to semiconductor structures and, more particularly, to back gate tuning circuits and methods of manufacture. The method includes applying a voltage to a back gate of a device; and selectively controlling the applied voltage to deactivate at least one trap within an insulating layer of the device to reduce noise contribution from the at least one trap.

Back gate tuning circuits

Growing community of inventors

Dresden, Germany

Jan Höntschel