Pfeiffer Vacuum Gmbh

Pfeiffer Vacuum Technology Ag

Pleiffer Vacuum Gmbh

Jan Hofmann

Martin Lohse

Tobias Stoll

Florian Bader

Robert Watz

Mirko Mekota

Jonas Becker

Heiko Schaefer

Wolfgang Soehngen

Michael Schweighoefer

Michael Schill

Bernhard Koch

Michael Willig

Lars Pauli

Florian Schneider

Erhard Harapat

Stefan Kallenborn

Verena Wangorsch

Gernot Bernhardt

Sebastian Latta

Maik Schaefer

Matthias Mädler

Thorsten Burggraf

Wolfgang Söhngen

Bernd Koci

Aleksandr Shirinov

Bernhard Tatzber

Uwe Leib

Andreas Zipp

Bernd Hofmann

Sönke Gilbrich

Thilo Wille

Sebastian SÜDWASSER

Jürgen Jung

Gilbrich SÖNKE

Jonas HÖLZ

Herbert Stammler

Max Birkenfeld

Siamak Rafii

Becker Jonas

Matthias Ankel

Michael Schweighöfer

Wolfgang Niessner

Jens Keller

Jürgen Keller

Heiko SCHÄFER

Maximilian Birkenfeld

Robert Walz

Jonas SÖHNGEN

Jannik Germann

Maik SCHÄFER

Jörn TÖNNISSEN

Michael SCHWEIGHÖFER

Marco Antonacci

Torsten Gogol

Johannes Schnarr

Peter Vorwerk

A vacuum pump in accordance with the invention, in particular a scroll vacuum pump, comprises a first spiral element that has a first wall that extends spirally about a first axis, that extends in an axial direction from a first support, and that has a first free end face facing away from the first support, and a second spiral element that has a second wall that extends spirally about a second axis, that extends in the axial direction from a second support, and that has a second free end face facing away from the second support, wherein the first spiral element and the second spiral element are movable relative to one another and are arranged such that the first wall and the second wall sealingly engage into one another while forming pumping spaces, wherein the free end face of at least one of the walls has a recess, in particular a groove, which extends in a longitudinal direction of the wall and in which at least one seal is movably arranged, and wherein the recess is laterally bounded by at least one inner wall that extends at least sectionally, preferably continuously, obliquely to the axial direction and that is configured to cooperate with a side wall of the seal extending at least sectionally, preferably continuously, obliquely to the axial direction.

Vacuum pump with movable trapezoidal seal

The invention relates to a scroll pump comprising a pressure sensor integrated into the scroll pump.

Vacuum pump, scroll pump, and manufacturing method for such

The present invention relates to a vacuum pump, in particular to a turbomolecular pump, having at least one pump stage and having a pressure determination unit for determining a pressure present at a suction side of the vacuum pump, said pump comprising a measurement device, with a measurement tap of the measurement device being provided in the region of the pump stage or downstream of the pump stage.

Vacuum pump

A vacuum pump has a working space, a bearing space, a dividing wall arranged between the working space and the bearing space and at least one rotor shaft which extends through the dividing wall and which forms a gap with the dividing wall and having a blocking device for blocking between the working space and the bearing space. The blocking device is formed by a Siegbahn pump stage which is configured for providing a pump action passing through the gap between the working space and the bearing space.

A vacuum pump includes a pump inlet, a pump outlet, a rotor rotatable about an axis of rotation, at least one process gas pump stage for conveying a process gas present at the pump inlet from the pump inlet to the pump outlet, a motor space, and a drive motor which is arranged in the motor space, is configured for rotationally driving the rotor and which has a motor stator, wherein at least one gas path is provided for the process gas from the pump inlet to the pump outlet which leads through the motor space and which leads at least sectionally along the motor stator or through the motor stator.

A stator element for a Holweck pump stage has a base shape of substantially cylinder jacket shape or a kit of parts for a stator element for a Holweck pump stage which has a base shape of a substantially cylinder jacket shape, wherein the stator element or the kit of parts comprises a plurality of stator parts which are separate from one another, which are assembled to form the stator element or can be assembled to form the stator element. A vacuum pump having a Holweck pump stage as well as to a method of manufacturing a stator element for a Holweck pump stage or of manufacturing a kit of parts for a stator element for a Holweck pump stage are also disclosed.

Stator element for a holweck pump stage, vacuum pump having a holweck pump stage and method of manufacturing a stator element for a holweck pump stage

The invention relates to a vacuum pump having at least one molecular pump stage, in particular a Holweck stage, which includes a rotor member which forms the pump-active surface of the molecular pump stage and having at least one side channel pump stage which is arranged downstream of the molecular pump stage and which includes a plurality of rotor elements, wherein the rotor elements of the side channel pump stage are supported by the rotor member of the molecular pump stage. The invention further relates to a vacuum pump having at least one molecular pump stage, in particular a Holweck stage, and having at least one side channel pump stage which is arranged downstream of the molecular pump stage and which includes a plurality of rotor elements, wherein the side channel pump stage is arranged between a pump inlet and the molecular pump stage.

Growing community of inventors

Gruenberg, Germany

Jan Hofmann