Laser-laboratorium Goettingen E.v

Schuler Pressen Gmbh

Laser-laboratorium Göttingen E.v.

Jan-Hendrik Klein-Wiele

Peter Simon

Alfred Nürbauer

Magnus Betting

Martin Erbe

Jürgen Stolz

The invention relates to a method and a device for modifying in a spatially periodic manner at least in some regions a surface of a substrate (), said surface being disposed on a sample plane (P) for which end different regions () of the substrate surface are acted upon successively with a spatially periodic illumination pattern of an energy density above a processing threshold of the substrate surface, where the illumination pattern is generated by diffraction of an input beam () and superimposition of resulting, diffracted sub-beams () by means of a grid interferometer (), and where, in order to select the substrate surface region to be illuminated in each case (), the input beam () is deviated by means of a beam-deviating unit () arranged upstream of the grid interferometer ().

Method and device for spatially periodic modification of a substrate surface

Growing community of inventors

Goettingen, Germany

Jan-Hendrik Klein-Wiele