Asml Netherlands B.v.

Jan Bex

Johannes Wilhelmus Damen

Eugene Maria Brinkhof

Nicolaas Ten Kate

Raymond Wilhelmus Louis Lafarre

Yogesh Pramod Karade

Yongxin Wang

Gerard Kums

Gerard Johannes Pieter Nijsse

Anko Jozef Cornelus Sijben

Raymond Jacobus Knaapen

Rui-Ling Lai

Nickolay Stepanenko

Ronny Hendrix

Lidewij Elisa Cornelissen

Robert Anton Brookhuis

Anko Sijben

Eugene Brinkhof

Detector modules, systems and methods for detecting signal beams are disclosed using a detector module and a support comprising a feedthrough. Furthermore, apparatuses, systems, and methods for sealing a vacuum system configured to provide an atmospheric environment and a vacuum chamber environment are disclosed. In some embodiments, a printed circuit board (PCB) comprising a first side for exposing to the atmospheric environment and a second side for exposing to the vacuum chamber environment and for covering an aperture in the vacuum chamber environment, wherein the second side is opposite to the first side. The apparatuses, systems, and methods may include a rigid body on the first side of the PCB and a device connected to the second side of the PCB and positioned on a portion of the PCB that covers the aperture. The PCB may be configured to provide an interface between the device and the rigid body.

Printed circuit board for sealing vacuum system

An electrostatic clamp for use in holding an object onto a supporting table, the electrostatic clamp comprising: a multi-layer film comprising an electrode defined in an electrically conducting layer which is positioned between electrically insulating layers.

Electrostatic clamp, lithographic apparatus, and device manufacturing method

A method of manufacturing a substrate holder for use in a lithographic apparatus, the method including providing a main body having a surface and a plurality of burls projecting from the surface and having end surfaces to support a substrate, providing a carrier surface adjacent the main body surface, and forming a conductive layer on at least part of the main body surface and an integral part on at least part of the carrier surface.

Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder

A method of bonding a MEMS device to a substrate to form a MEMS device assembly. A thickness profile of the MEMS device and/or the flatness of the mating surface of the substrate is determined. An adhesive is deposited onto a mating surface of the MEMS device and/or the mating surface of the substrate. The mating surfaces of the MEMS device and substrate are brought together, such that the adhesive can bond the MEMS device to the substrate. The volume of adhesive deposited at particular locations on the mating surface is varied to compensate for local variations in the thickness profile of the MEMS device and/or the flatness of the mating surface of the substrate.

MEMS device and assembly method

Growing community of inventors

Overpelt, Belgium

Jan Bex