U.S. Philips Corporation

Jan B Le Poole

Karel D Van Der Mast

Nicolaas H Dekkers

An apparatus for energy-selective visualization of a beam of charged particles emerging from an object is equipped with a double-focusing energy analyzer which is provided with a two-dimensional entrance diaphragm. For visualization of both an image and a spectrum, an optical imaging system behind the analyzer is preferably equipped with one or more quadrapole lenses. An illumination system for an object to be examined is preferably equipped with a system for a sequential partial illumination of the object.

Apparatus for energy-selective visualization

The scanning system of a scanning microscope for the imaging of phase structures is adapted to form a scanning pattern which is free from discontinuities. The detector is divided into a number of sub-regions with the direction of the dividing lines of the detector being adapted to the scanning pattern. The scanning pattern is notably meander-shaped and the detector is divided into four quadrants. The deflection system is digitally controlled and the microscope may be an electron microscope.

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Tucson, AZ, United States of America

Jan B Le Poole