Average Co-Inventor Count = 3.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Other (2 from 832,680 patents)
2 patents:
1. 6798529 - In-situ method and apparatus for end point detection in chemical mechanical polishing
2. 6476921 - In-situ method and apparatus for end point detection in chemical mechanical polishing