Fei Comapny

Jamie McCormack

Peter Christiaan Tiemeijer

Maarten Kuijper

Bert Henning Freitag

Gerard Nicolaas Anne Van Veen

Sorin Lazar

Rudolf Geurink

Abhay Kotecha

Stephan Kujawa

Evgeniia Pechnikova

The disclosure relates to a method of imaging a specimen using a transmission charged particle microscope, said method comprising providing a specimen, and providing a charged particle beam and directing said charged particle beam onto said specimen for generating a flux of charged particles transmitted through the specimen. The method comprises the step of generating and recording a first energy filtered flux of charged particles transmitted through the specimen, wherein said first energy filtered flux of charged particles substantially consists of non-scattered and elastically scattered charged particles. The method as disclosed herein comprises the further step of generating and recording a second energy filtered flux of charged particles transmitted through the specimen, wherein said second energy filtered flux of charged particles substantially consists of inelastically scattered charged particles. Said first and second recorded energy filtered flux are then used for imaging said specimen with increased contrast.

Method of imaging a specimen using a transmission charged particle microscope

A method of performing Electron Energy-Loss Spectroscopy (EELS) in an electron microscope, comprising: specifically comprising:

EELS detection technique in an electron microscope

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Eindhoven, Netherlands

Jamie McCormack