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Kulite Semiconductor Products, Inc.

James William Bice

Anthony D Kurtz

Joseph R Mallon

Amnon Brosh

Harold Bernstein

Charles L Gravel

There is disclosed an apparatus and a technique for shunt calibration of a Wheatstone bridge array independent of temperature. The structure involves a side completion half bridge array which has two temperature sensitive resistors as semiconductor strain gages forming one arm of the bridge and two temperature insensitive resistors forming the other arm of the bridge. An input voltage is applied to two opposite terminals of the bridge via equal span resistors and an output is taken between the common terminals of each of the bridge arms. A calibration resistor is positioned to shunt a span resistor and a temperature insensitive resistor to provide a calibrated output voltage of a magnitude independent of temperature.

Apparatus and methods for the shunt calibration of semiconductor strain

A beam transducer of the type activated by a push rod secured to a thin silicon diaphragm including a shallow deflection area determining depression. The rod is secured to the silicon within the depression and is surrounded by a plate of glass having a central rod accommodating aperture and secured to the silicon to generally cover the depression with the rod extending through the aperture in the glass. One end of the rod is coupled to a diffused beam for application of force thereto. Large forces as applied to the diaphragm and hence, the rod and the beam are limited when the silicon is caused to contact the glass plate and is stopped by the plate and according to the depth of the depression.

Beam type transducers employing accurate, integral force limiting

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Wayne, NJ, United States of America

James William Bice