Hughes Aircraft Company

James W Roach

Wing Y Lum

Frank J Scholz

A microelectronic device of the MOSFET type (20) is structured to exhibit low noise characteristics at cryogenic temperatures of less than about 40K. The device (20) comprises a doped silicon substrate wafer (22), the dopant having an ionization energy in the substrate of more than about 0.1 eV. Preferred substrate dopants include tellurium as an n-type dopant and indium as a p-type dopant. A metal-oxide-semiconductor field effect transistor (20) in the substrate wafer (22) includes a source (24), a drain ( 26 ), and a gate (30) intermediate the source (24) and the drain (26).

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La Mesa, CA, United States of America

James W Roach