Massachusetts Institute of Technology

James W Caunt

Christine A Wang

Robert A Brown

Steven E Forman

A gaseous mixture is introduced through a radial inlet into a plenum-like antichamber above a porous diaphragm mounted across the top of a reactor vessel of substantially uniform width. The antichamber and diaphragm are substantially coextensive with the width of the vessel. The diaphragm may form part of a removable cover/diaphragm unit received in a collar-like ring. The substrate holder includes a molybdenum cap and base which fits over a pedestal of refractory material carrying a temperature sensor with an electrical lead extending down the hollow core of a rotatable reactor

Vapor phase reactor for making multilayer structures

Apparatus and system for inspecting infrared transparents, such as an array of photovoltaic modules containing silicon solar cells, includes an infrared microscope, at least three sources of infrared light placed around and having their axes intersect the center of the object field and means for sending the reflected light through the microscope. The apparatus is adapted to be mounted on an X-Y translator positioned adjacent the object surface.

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Concord, MA, United States of America

James W Caunt