Mattson Technology, Inc

Cablelift Oil Corporation

James Tsuneo Taoka

Zion Koren

Rudy Santo Tomas Cardema

Conor Patrick O'Carroll

Paul Janis Timans

Shuen Chun Choy

Arieh A Strod

Shawn Gibson

Craig McFarland

Yorkman Ma

Lois Wride

George L Pisors

An apparatus for heat treating semiconductor wafers is disclosed. The apparatus includes a heating device which contains an assembly linear lamps for emitting light energy onto a wafer. The linear lamps can be placed in various configurations. In accordance with the present invention, tuning devices which are used to adjust the overall irradiance distribution of the light energy sources are included in the heating device. The tuning devices can be, for instance, are lamps or lasers.

Heating configuration for use in thermal processing chambers

The present invention is generally directed to a system and process for rotating semiconductor wafers in thermal processing chambers, such as rapid thermal processing chambers and chemical vapor deposition chambers. In accordance with the present invention, a semiconductor wafer is supported on a substrate holder which, in turn, is supported on a rotor. During processing, the rotor is magnetically levitated and magnetically rotated by suspension actuators and rotation actuators positioned outside of the chamber.

Method and system for rotating a semiconductor wafer in processing chambers

An apparatus for heat treating semiconductor wafers in a thermal processing chamber using light energy is provided. In one embodiment, the apparatus contains a window located between the semiconductor wafer and the energy source. The window contains a member that defines at least one passage capable of being placed into communication with a coolant to cool the window and at least partially offset the &ldquo;first wafer effect&rdquo;. Additionally, in some embodiments, the window has a thickness greater than about 1 inch so that it can withstand pressures applied during wafer processing.

Windows used in thermal processing chambers

A cable pulley transmission has a plurality of pulleys with flight receiving pockets, an endless cable trained about the pulleys, and a plurality of flights located at spaced intervals along the cable. The flights on the cable fit into the flight receiving pockets of the pulleys for transmitting motion between the pulleys and the cable. Each of the flights are formed by two half-sections that are mounted together about the cable. Such a transmission can be used as a lift for liquid. One pulley is located in a source of liquid and at least one pulley is located above the liquid source. The cable has an ascending section and a descending section. The flights are spaced to maintain a column of liquid surrounding the ascending cable section. When the liquid handled is of a lower viscosity than necessary for adhering to the flights and cable of the ascending section, a tube can be positioned about the ascending section to serve as a conduit for conveying liquid therethrough and to hold the pulley in the liquid source. At least one of the flights joins separate cable ends to form an endless cable.

Liquid lift

Growing community of inventors

San Jose, CA, United States of America

James Tsuneo Taoka