Sio2 Medical Products, Inc.

Si02 Medical Products, Inc.

James Troy Gresham

John Thomas Felts

Thomas E Fisk

Brian Russell Lilly

Joseph A Jones

A method for coating a substrate surface such as a syringe part by PECVD is provided, the method comprising generating a plasma from a gaseous reactant comprising an organosilicon precursor and optionally an oxidizing gas by providing plasma-forming energy adjacent to the substrate, thus forming a coating on the substrate surface by plasma enhanced chemical vapor deposition (PECVD). The plasma-forming energy is applied in a first phase as a first pulse at a first energy level followed by further treatment in a second phase at a second energy level lower than the first energy level. The lubricity, hydrophobicity and/or barrier properties of the coating are set by setting the ratio of the Oto the organosilicon precursor in the gaseous reactant, and/or by setting the electric power used for generating the plasma.

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Opelika, AL, United States of America

James Troy Gresham