Nanogram Corporation

Neophotonics Corporation

Applied Materials, Inc.

Applied Komatsu Technology, Inc.

James T Gardner

Xiangxin Bi

Sujeet Kumar

Ronald James Mosso

Nobuyuki Kambe

Craig R Horne

Shivkumar Chiruvolu

William E McGovern

Hariklia Dris Reitz

Pierre J DeMascarel

James A Gilliam

Kam S Law

Quanyuan Shang

Herman Adrian Lopez

Benjamin M Chaloner-Gill

Robert M Robertson

Eric Euvrard

Christian C Honeker

Jesse S Jur

Ronald M Cornell

Vince Pham

Seung M Lim

Wendell T Blonigan

Robert B Lynch

Shivkumar Chiruvolo

Samuel R Phillips

Light reactive deposition uses an intense light beam to form particles that are directly coated onto a substrate surface. In some embodiments, a coating apparatus comprising a noncircular reactant inlet, optical elements forming a light path, a first substrate, and a motor connected to the apparatus. The reactant inlet defines a reactant stream path. The light path intersects the reactant stream path at a reaction zone with a product stream path continuing from the reaction zone. The substrate intersects the product stream path. Also, operation of the motor moves the first substrate relative to the product stream. Various broad methods are described for using light driven chemical reactions to produce efficiently highly uniform coatings.

Apparatus for coating formation by light reactive deposition

Methods are described that have the capability of producing submicron/nanoscale particles, in some embodiments dispersible, at high production rates. In some embodiments, the methods result in the production of particles with an average diameter less than about 75 nanometers that are produced at a rate of at least about 35 grams per hour. In other embodiments, the particles are highly uniform. These methods can be used to form particle collections and/or powder coatings. Powder coatings and corresponding methods are described based on the deposition of highly uniform submicron/nanoscale particles.

Methods for synthesizing submicron doped silicon particles

Nanoscale particles, particle coatings/particle arrays and corresponding consolidated materials are described based on an ability to vary the composition involving a wide range of metal and/or metalloid elements and corresponding compositions. In particular, metalloid oxides and metal-metalloid compositions are described in the form of improved nanoscale particles and coatings formed from the nanoscale particles. Compositions comprising rare earth metals and dopants/additives with rare earth metals are described. Complex compositions with a range of host compositions and dopants/additives can be formed using the approaches described herein. The particle coating can take the form of particle arrays that range from collections of disbursable primary particles to fused networks of primary particles forming channels that reflect the nanoscale of the primary particles. Suitable materials for optical applications are described along with some optical devices of interest.

Optical materials and optical devices

Light reactive deposition uses an intense light beam to form particles that are directly coated onto a substrate surface. In preferred embodiments, a coating apparatus comprising a noncircular reactant inlet, optical elements forming a light path, a first substrate, and a motor connected to the apparatus. The reactant inlet defines a reactant stream path. The light path intersects the reactant stream path at a reaction zone with a product stream path continuing from the reaction zone. The substrate intersects the product stream path. Also, operation of the motor moves the first substrate relative to the product stream. Various broad methods are described for using light driven chemical reactions to produce efficiently highly uniform coatings.

Coating formation by reactive deposition

A collection of zinc oxide nanoparticles have been produced by laser pyrolysis. The zinc oxide nanoparticles have average particle diameters of less than about 95 nm and a very narrow particle size distribution. The laser pyrolysis process is characterized by the production of a reactant stream within the reaction chamber, where the reactant stream includes a zinc precursor and other reactants. The zinc precursor can be delivered as an aerosol.

Multiple reactant nozzles for a flowing reactor

Nanoparticle-based power coatings and corresponding structures

Collections of particles comprising multiple a metal oxide can be formed with average particle sizes less than about 500 nm. In some embodiments, the particle collections have particle size distributions such that at least about 95 percent of the particles have a diameter greater than about 40 percent of the average diameter and less than about 160 percent of the average diameter. Also, in further embodiments, the particle collections have particle size distribution such that effectively no particles have a diameter greater than about four times the average diameter of the collection of particles.

Multiple metal oxide submicron particles

Batteries based on nanoparticles are demonstrated that achieve high energy densities. Vanadium oxide nanoparticles can have several different stoichiometries and corresponding crystal lattices. The nanoparticles preferably have average diameters less than about 500 nm and more preferably less than about 150 nm. Cathodes produced using the vanadium oxide nanoparticles and a binder can be used to construct lithium batteries or lithium ion batteries. The nanoparticles may have energy densities greater than about 900 Wh/kg.

Batteries with electroactive nanoparticles

Combinatorial synthesis methods obtain a plurality of compositions having materially different characteristics using an apparatus having a plurality of collectors. A first quantity of fluid reactants are reacted to form a first quantity of product composition. Following completion of the collection of the first quantity of product composition, a second quantity of fluid reactants are reacted to form a second quantity of product composition, the second quantity of product composition being material different from the first quantity of product composition. An apparatus includes a nozzle connected to a reactant source and a plurality of collectors. The nozzle and plurality of collectors move relative to each other such that a collector can be selectively placed to receive a fluid stream emanating from the nozzle. The plurality of product compositions can be evaluated to determine their suitability for various applications.

Combinatorial chemical synthesis

An aerosol delivery apparatus is used to deliver an aerosol into a reaction chamber for chemical reaction to produce reaction products such as nanoparticles. A variety of improved aerosol delivery approaches provide for the production of more uniform reaction products. In preferred embodiments, a reaction chamber is used that has a cross section perpendicular to the flow of reactant having a dimension along a major axis greater than a dimension along a minor axis. The aerosol preferably is elongated along the major axis of the reaction chamber.

Reactant delivery apparatuses

Improved reaction chamber designs are described that provide for improved control over the flow within the reaction chamber. The reaction chambers contain reactions for particle production from a flowing reactant stream. Improved reactant delivery nozzles are described that are useful for the delivery of gas/vapor reactants and/or aerosol reactants. Improved nozzle designs can result in more uniform reactant flow. Suitable reactors can comprise an electromagnetic radiation source that projects through the reactor to drive the reaction at an electromagnetic radiation reaction zone. The improved nozzle features are suitable for reactors for particle collection and/or for coating of substrates within the reaction chamber.

Reactant nozzles within flowing reactors

An apparatus and method for holding a substrate on a support layer in a processing chamber. The method includes the steps of positioning the substrate a predetermined distance from the support layer, introducing a plasma in the processing chamber, lowering the substrate to a point where the substrate engages the support layer, and maintaining the plasma for a predetermined time. The apparatus is directed to a susceptor system for a processing chamber in which a substrate is electrostatically held essentially flat. The apparatus includes a substrate support and a support layer composed of a dielectric material disposed on the substrate support. At least one lift pin is used for supporting the substrate relative to the support layer. Means are provided for moving each lift pin relative to the support layer. Means are also provided for producing a plasma within the processing chamber.

Method and apparatus for electrostatically maintaining substrate flatness

A method and apparatus for cleaning a CVD chamber including optoelectronic detection of the completion or endpoint of the cleaning procedure once a ratio of emission lines reaches a threshold value. The method comprises the steps of: providing a plasma of a cleaning gas into the chamber and creating a plasma from the cleaning gas. The intensity of emission lines of the cleaning gas and of at least one background gas in the chamber are monitored. A ratio of the intensity of the cleaning gas emission line to the intensity of the background gas emission line is determined and monitored as a function of time. The determined ratio is compared to a preset threshold calibration value. The flow of gas is controlled based on the comparing step. The apparatus includes a cleaning gas supply with a valved inlet providing an entrance to the interior of the chamber for passing cleaning gas to the interior of the chamber. A detector having an optical input is disposed for sensing the electromagnetic radiation. The detector has a first channel for detecting a relative intensity of an emission line corresponding to the cleaning gas and a second channel for detecting a relative intensity of the emission line corresponding to the background gases. Software or circuitry is employed to determine a normalized signal using a signal from the first channel and a signal from the second channel. The value of the normalized signal is substantially invariant with respect to simultaneous corresponding changes in the intensity of the signal measured by the first channel and the intensity of the signal measured by the second channel.

Growing community of inventors

San Jose, CA, United States of America

James T Gardner