Novellus Systems Incorporated

James Sheldon Templeton

Damon Tyrone Genetti

Shawn M Hamilton

Rich Blank

Methods and systems for positioning wafers using a dual side-by-side end effector robot are provided. The methods involve performing place moves using dual side-by-side end effector robots with active wafer position correction. According to various embodiments, the methods may be used for placement into a process module, loadlock or other destination by a dual wafer transfer robot. The methods provide nearly double the throughput of a single wafer transfer schemes by transferring two wafers with the same number of moves.

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San Jose, CA, United States of America

James Sheldon Templeton