Submicron Systems, Inc.

Other

James S Molinaro

Robert W Grant

Eric Stupp

Robert H Grant

High temperature ceramic nut of aluminum oxide for use in coupling a flared tube to a flare fitting.

High temperature ceramic nut

Low profile self-draining wafer carrier holder for gripping and carriage of semiconductor wafer carriers through robotically, automated or manual processing equipment. Opposing members extend horizontally from a central base with gripping fingers at outer extremities to grip wafer carriers for automatic processing. A handle member extends vertically from the central base member, and includes a handle member for accommodation by robotic end effectors. Beveled and angled surfaces in a preferred one-piece construction aid in accelerated fluid chemical runoff. An alternative embodiment includes a high temperature wafer carrier holder with a sloped handle and internal quartz structural rods to prevent warping of the holder.

Wafer carrier holder for wafer carriers

Low profile self-draining wafer carrier holder for gripping and carriage of semiconductor wafer carriers through robotically, automated or manual processing equipment. Opposing members extend horizontally from a central base with gripping fingers at outer extremities to grip wafer carriers for automatic processing. A handle member extends vertically from the central base member, and includes a handle member for accommodation by robotic end effectors. Beveled and angled surfaces in a preferred one-piece construction aid in accelerated fluid chemical runoff.

A gas diffusion system for evenly distributing injected gas in a bath including a diffusion sparger plate for spreading and distributing the gas. Gas moves horizontally under the plate, and is relayed upward through a set of gas passages in the plate.

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Allentown, PA, United States of America

James S Molinaro