Average Co-Inventor Count = 3.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Kla Corporation (2 from 529 patents)
2 patents:
1. 11784071 - Process temperature measurement device fabrication techniques and methods of calibration and data interpolation of the same
2. 11315811 - Process temperature measurement device fabrication techniques and methods of calibration and data interpolation of the same