Minnesota Mining and Manufacturing Company

James R Gilbert

Nang T Tran

Kenneth R Paulson

Derrick P Grimmer

Michael F Weber

Frank E Aspen

Frank R Jeffrey

A light transmissive, electrically conductive oxide is doped with a stabilizing gas such as H.sub.2 and H.sub.2 O. The oxide is formed by sputtering a light transmissive, electrically conductive oxide precursor onto a substrate at a temperature from 20.degree. C. to 300.degree. C. Sputtering occurs in a gaseous mixture including a sputtering gas and the stabilizing gas.

Light transmissive electrically conductive oxide electrode formed in the

Semiconductor layer and conductive layer formed on a flexible substrate, divided into individual devices and interconnected with one another in series by interconnection layers and penetrating terminals.

Interconnected semiconductor devices

A light transmitting electrically conductive stacked film, useful as a light transmitting electrode, including a first light transmitting electrically conductive layer, having a first optical thickness, a second light transmitting layer, having a second optical thickness different from the optical thickness of the first layer, and an electrically conductive metallic layer interposed between and in initimate contact with the first and second layers.

Photovoltaic device having light transmitting electrically conductive

Method for fabricating an interconnected array of semiconductor devices

Growing community of inventors

Saint Paul, MN, United States of America

James R Gilbert