Optical Research Associates

Asml Netherlands B.v.

Other

Kla Tencor Corporation

Asml Holding N.v.

James P McGuire, Jr

William J Cassarly

John Rice Rogers

Daniel C Wack

Damon Floyd Kvamme

John Michael Rodgers

Thomas L R Davenport

Jeffrey M Hoffman

Douglas A Nutter

One embodiment relates to an apparatus that includes an illumination source () for illuminating a target substrate (), objective optics () for projecting the EUV light which is reflected from the target substrate, and a sensor () for detecting the projected EUV light. The objective optics includes a first mirror (, or) which is arranged to receive and reflect the EUV light which is reflected from the target substrate, a second mirror (, or) which is arranged to receive and reflect the EUV light which is reflected by the first mirror, a third mirror (, or) which is arranged to receive and reflect the EUV light which is reflected by the second mirror, and a fourth mirror (, or) which is arranged to receive and reflect the EUV light which is reflected by the third mirror.

Apparatus for EUV imaging and methods of using same

Various embodiments described herein comprise mixers comprising a light pipe having input and output ends and a central region therebetween. An optical path extends in a longitudinal direction from the input end through the central region to the output end. The central region of the light pipe comprises one or more rippled reflective sidewalls having a plurality of elongate ridges and valleys and sloping surfaces therebetween. Light from the input end propagating along the optical path reflects from the sloping surfaces and is redirected at a different azimuthal direction toward the output end thereby mixing the light at the output end. Illuminance and/or color mixing can therefore be provided.

Rippled mixers for uniformity and color mixing

An optical imaging system for producing an optical image includes one or more powered optical elements with polarization aberration that degrade said optical image; and a polarization rotation system configured to reduce the contributions of the polarization aberration to the degradation of said optical image. The optical system may be used in a photolithography tool to pattern substrates such as semiconductor substrates and thereby produce semiconductor devices.

Structures and methods for reducing aberration in optical systems

An optical system includes multiple cubic crystalline optical elements and one or more uniaxial birefringent elements in which the crystal lattices of the cubic crystalline optical elements are oriented with respect to each other to reduce the effects of intrinsic birefringence and produce a system with reduced retardance. The net retardance of the system is reduced by the cancellation of retardance contributions from the multiple cubic crystalline optical elements and the uniaxial birefringent element. The optical system may be used in a photolithography tool to pattern substrates such as semiconductor substrates and thereby produce semiconductor devices.

Methods for reducing polarization aberration in optical systems

Various embodiments described herein comprise illuminators comprising a phosphor color wheel for producing colored light. Light of a first wavelength emitted by a light source is incident on a phosphor color wheel comprising a plurality of different regions, where at least one of these regions comprises a phosphor that fluoresces at a second wavelength when illuminated with light of the first wavelength. The light from the light source and the different regions of the phosphor color wheel are movable with respect to each other such that as the different regions are illuminated by the light, different colors are produced.

Phosphor wheel illuminator

One embodiment of the invention comprises a simplified light-weight head mounted displays comprising an off-axis combiner and imaging optics defining an optical path. The imaging optics comprises a lens group comprising a plurality of lenses in the optical path. The lens group has a first optical axis. Each of said plurality of lenses have optical axes collinear with the first optical axis. The imaging optics further comprises a single lens element in the optical path having a second optical axis that is different from the first optical axis. The single lens element has positive optical power and is the only lens element in the optical path between the lens group and the combiner that has an optical axis collinear with the second optical axis.

Compact head mounted display devices with tilted/decentered lens element

A wavelength selective optical switch particularly usable as a programmable N&#xd7;M optical switch in a multi-wavelength communication system. The switch uses a grating that separates multi-channel optical signals into a plurality of optical channels, and combines a plurality of optical channels into multi-channel optical signals. Programmable mirrors switch each optical channel to any of a plurality of fibers coupled to the switch.

Wavelength selective optical switch

Optical relays having three or more reflector portions to allow efficient grazing angle reflections with a relatively high acceptance of light are described. Light collected by the relay can be delivered to a selected location for various applications, including semiconductor lithography. In some embodiments, the grazing angles are selected to utilize the high reflectivity of extreme ultraviolet light at low grazing angles. The three or more reflectors can be arranged with respect to a light source to provide such grazing angle reflections and high acceptance. Some collectors can have more than one shell to increase the acceptance. In some embodiments, some of the reflectors can be configured to shape the delivered light.

Grazing incidence relays

An optical system includes at least one cubic crystalline optical element aligned along an optical axis, the at least one cubic crystalline optical element being birefringent and imparting retardance on a beam of light propagating through the optical system along the optical axis, and polarization rotation optics inserted along the optical axis and selected to rotate the polarization of the beam of light to at least partially reduce the retardance.

Various embodiments involving structures and methods for illumination can be employed, for example, in projectors, head-mounted displays, helmet-mounted displays, back projection TVs, flat panel displays as well as other optical systems. Certain embodiments may include prism elements for illuminating, for example, a spatial light modulator. Light may be coupled to the prism in some cases using fiber optics or lightpipes. The optical system may also include a diffuser having scatter features arranged to scatter light appropriately to produce a desired luminance profile. Other embodiments are possible as well.

Beamsplitting structures and methods in optical systems

Light distribution apparatus and methods for illuminating optical systems

A multi-channel optical switching system particularly usable as a programmable optical add/drop multiplexer in a multi-wavelength communication system. The switching system uses a grating operating at Littrow that separates a multi-channel optical signal into a plurality of optical channels, and combines a plurality of optical channels into a multi-channel optical signal. The system also uses a plurality of optical ports optically coupled to the grating and a selecting device to select which optical channel is directed to which of the optical ports.

Growing community of inventors

Pasadena, CA, United States of America

James P McGuire, Jr