J.a. Woollam Co.

James N Hilfiker

Martin M Liphardt

Craig M Herzinger

Ping He

Corey L Bungay

Jianing Sun

Blaine D Johs

John A Woollam

Galen L Pfeiffer

Thomas E Tiwald

Ronald A Synowicki

Gregory K Pribil

System for, and method of ellipsometric investigation of and analysis of samples which have, for instance, a non-random effectively 'regular' textured surface, and/or a surface characterized by an irregular array of faceted structures.

Ellipsometric investigation and analysis of textured samples

Disclosed is a system for controlling focus, angle of incidence and intensity of an electromagnetic beam over a spectrum of wavelengths, and methodology for optimizing investigation of samples which demonstrate low specular reflectance and/or are depolarizing of a polarized beam of electromagnetic radiation, such as solar cells.

System for controlling intensity of a beam of electromagnetic radiation and method for investigating materials with low specular reflectance and/or are depolarizing

Simultaneous use of wavelengths in at least two ranges selected from RADIO, MICRO, FIR, IR, NIR-VIS-NUV, UV, DUV, VUV EUV, XRAY in a regression procedure to evaluate parameters in mathematical dispersion structures to model dielectric functions.

Sample analysis methodology utilizing electromagnetic radiation

Disclosed is a method of evaluating sample system anisotropic refractive indices, and orientations thereof with respect to an alignment surface, in multiple dimensions. The preferred method involves a sequence of steps which allows overcoming mathematical model parameter correlation during mathematical regression parameter evaluation, even though individually, steps of the present invention method wherein anisotropic refractive indices, or differences therebetween, are evaluated, require that only a relatively simple one dimensional data set be acquired.

Method for evaluating sample system anisotropic refractive indices and orientations thereof in multiple dimensions

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Lincoln, NE, United States of America

James N Hilfiker