Bruker Nano Gmbh

Other

Veeco Instruments Inc.

Digital Instruments

James M Young

Jason Osborne

Vladimir Fonoberov

Sean Michael Hand

Charles R Meyer

Virgil B Elings

John A Gurley

Daniel A Cohen

David A Grigg

Jay E Robinson

Craig B Prater

Paul I Mininni

Jeffrey S Greenberg

William H Hertzog

A method of operating an atomic force microscope (AFM), using a denoising algorithm, real-time, during AFM data acquisition. Total Variation and Non-Local Means denoising are preferred. Real time images with minimized sensor noise needing no post-image acquisition processing to account for noise as described herein results.

AFM imaging with metrology-preserving real time denoising

An atomic force microscope (AFM) and method of operating the same includes a separate Z height sensor to measure, simultaneously with AFM system control, probe sample distance, pixel-by-pixel during AFM data acquisition. By mapping the AFM data to low resolution data of the Z height data, a high resolution final data image corrected for creep is generated in real time.

AFM imaging with creep correction

A levitated XY stage with a mechanism to disable the bearing element to allow the physical elements of the stage to come into contact with one another and 'Coulomb weld' together, thereby eliminating drift. Preferably, the XY position shift of the stage that results from disabling the bearing is measured, and feed-forward communication to, for example, the AFM scanner is used to enable an offset and remove the error.

Method and apparatus of compensating for position shift

A method and apparatus of engaging a probe with a sample surface including automatically reducing the spacing between a probe of a probe based instrument and a sample from an initial separation to one in which the probe is positioned for obtaining a sample surface measurement in less than ten seconds without damaging either the probe or the sample. The method includes oscillating the probe, measuring at least one parameter of probe oscillation and then engaging the probe and the sample by generally continuously controlling the reducing step based on the measuring step to reduce the separation from an initial separation to an engage position. In addition to feeding back directly on the tip-sample interaction, a direct communication line is provided between the processor used to generate control signals that govern the engage and a conventional motion controller. In an alternative, a coarse positioning actuator and a fine positioning actuator in which the control of both is coordinated under feedback to place the probe in the engaged position, and wherein the close approach phase of the algorithm is controlled by a dedicated real time controller.

Method and apparatus for rapid automatic engagement of a probe

A scanning probe microscope and method having automated exchange and precise alignment of probes, wherein one or more additional stored probes for installation onto a probe mount are stored in a storage cassette or a wafer, a selected probe is aligned to a detection system, and the aligned probe is then clamped against the probe mount. Clamping is performed using a clamp which is disabled when removing a replacement probe from the storage cassette, enabled when installing the probe on the probe mount and disabled when releasing the probe at a later time for subsequent probe exchange. Probe alignment is automated using signals from the probe detection system or by forming an optical image of the probe using a camera or similar technique and determining probe positioning using pattern recognition processing of the probe image to allow probe removal and exchange without operator intervention. Techniques for error checking are employed to ensure proper probe installation and operation.

Scanning probe microscope having automatic probe exchange and alignment

An optical non-contact surface profiler for determining (i) the surface profile of a transparent layer on a light-absorbing or opaque substrate, (ii) the surface profile of a light-absorbing or opaque substrate through a transparent layer, and (iii) the thickness profile of a transparent layer on a light-absorbing or opaque surface. A microscope alternatively configured in interferometric mode and in spectrophotometric mode provides phase data from an interference pattern and reflectance data from a reflectance pattern, respectively. A photo-sensing device receives the interference patterns and reflectance patterns and inputs the corresponding phase data and reflectance data to a computing device. The computing device processes the data to determine the appropriate surface or film thickness profiles.

Optical profiler for films and substrates

A device which is for reclaiming oil from a body of water and which is mounted on a floating vehicle, including a dispersal mechanism to spread ferromagnetic particles in the oil, a collection apparatus connected to a vacuum chamber, and a pulsating magnetic field for drawing oil impregnated with ferromagnetic particles toward the collection apparatus. The oil-particle mixture is separated in the hold of the floating vehicle.

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Santa Barbara, CA, United States of America

James M Young