Fsi Corporation

James M Silvernail

Dallas J Schneider

Clifford C Miller

A spray processing machine for processing silicon wafers in the manufacture of integrated circuit chips the bowl defining the processing chamber being formed of molded plastic of a type which is highly inert to the deteriorating effects of highly active chemicals such as hydrochloric and hydrofluoric acid and similar highly active chemicals. The molded bowl has upright side walls with a cylindrical configuration and flat areas on the inner periphery to accommodate mounting spray posts on an upright position. The molded plastic housing also has a base wall which is peripherally downwardly spiraling configuration toward the drain port and from the highest portion of the base wall, also immediately adjacent the drain port; there being a step in the base wall defining a riser face facing opposite to the direction of the slope of the base wall and also facing opposite to the direction of rotation of the rotor in the processing chamber which carriers the wafers being processed. The base wall of the molded housing also defining integrally therewith, a rinsing water spray port to spray water against the bottom side of the turntable; and integrally formed an annular ribs spaced from each other concentric of the rotation axis to act with similar ribs on the turntable to define a labyrinth against flow of liquids inwardly toward the centrally disposed shaft.

Bowl for liquid spray processing machine

Centrifugal processing machine for spray processing wafers of silicon and the like the machine having a processing chamber closed by a door and having a generally horizontal orientation with the rotor also substantially horizontally oriented. The peripheral sidewall of the process chamber has an offset defined by overlapping edge portions defining a circumferentially facing drainage slot, facing in the same direction as the rotor revolves; the process chamber being maintained under slightly positive pressure above atmospheric pressure to the extent of about 10 to 12 inches of water; the transparent door panel having a groove at the inner face of the door panel and traversing of the transparent panel from its center in radial directions oblique to each other, and an adjoining dry nitrogen nozzle directing a spray of nitrogen across the inner face of the transparent door panel and across one end of the groove in the door panel.

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Maple Plain, MN, United States of America

James M Silvernail