International Business Machines Corporation

Globalfoundries Inc.

Avx Corporation

James M Oberschmidt

Jed Hickory Rankin

James William Adkisson

John L Galvagni

Hormazdyar M Dalal

James N Humenik

Josef S Watts

Maria Gabrani

Kris V Srikrishnan

Hung Y Ng

Frank A Montegari

Michael J Sullivan

Paul S Ho

David T Shen

James R Lloyd

Ramya Viswanathan

Amr Y Abdo

Allen J Arnold

Nathalie Casati

Jasvir Singh Jaspal

Robert A Miller

Michael Caterer

James T Marsh

Devandra Gupta

David P Fouts

Shin-Wu Chiang

Michael E Bariether

Richard E Horstmann

Methods, program products, and systems for improving optical proximity correction (OPC) calibration, and automatically determining a minimal number of clips, are disclosed. The method can include using a computing device to perform actions including: calculating a total relevancy score for a projected sample plan including a candidate clip, and wherein the relevancy score is derived from at least one relevancy criterion and a relevancy weight; calculating a relevancy score for the candidate clip, the relevancy score for the candidate clip being a contribution from the candidate clip to the total relevancy score; and adding the candidate clip to a sample plan for the IC layout and removing the candidate clip from the plurality of clips in response a difference in relevancy score between the projected sample plan and one or more previous sample plans substantially fitting a non-linear relevancy score function.

Sample plan creation for optical proximity correction with minimal number of clips

A pattern in a surface is defined by providing on the surface a hard mask material; depositing an anti-reflective coating on the hard mask material; applying a photoresist layer on the anti-reflective coating; patterning the photoresist layer, anti-reflective layer and hard mask material; and removing the remaining portions of the photoresist layer and anti-reflective layer; and then patterning the substrate using the hard mask as the mask. Also provided is a structure for defining a pattern in a surface which comprises a surface having a hard mask material thereon; an anti-reflective coating located on the hard mask material; and a photoresist located on the anti-reflective coating. Also provided is an etchant composition for removing the hard mask material which comprises an aqueous composition of HF and chlorine.

Process for defining a pattern using an anti-reflective coating and

An improved method for forming shorting bars on ceramic capacitors of the tab type includes the step of effecting a final polishing of the tab exposed surface utilizing grit or abrasives of a critical size, namely of average particle size in the range of about 2 to about 10 microns. The method further employs thin film metallurgy namely the vacuum deposition or sputtering of one or more layers within specified thickness ranges. There is further disclosed an improved capacitor fabricated in accordance with the method described.

Method of forming thin film terminations of low inductance ceramic

Disclosed is a multilayer capacitor consisting of a plurality of laminae with each of the laminae including a conductive plate portion and a non-conductive sheet portion. The conductive plate portion has at least one tab projecting to at least one edge of the conductive plate portion with the maximum number of tabs per conductive plate portion being limited to avoid excessive lateral congestion. The laminae are divided into different groups with the laminae from each group having the same number and location of tabs and with the laminae from different groups differing by at least the location of the tabs. The laminae are interleaved so that:

Multilayer capacitor

A capacitor with a low parasitic inductance, which is particularly suited for use as a decoupling capacitor, that has a prismatic or polyhedral shape and includes a plurality of internal capacitor plates positioned and separated by dielectric material. The improvement is that each plate is provided with a tab that projects diagonally to a corner of the body with the edge of the tab exposed. A metal layer on the outside of the body electrically connects the plates in the desired sequence.

Low inductance capacitor

Electromigration activity is decreased and lifetime is extended in solder stripes employed as conductors and terminals on microelectronic devices by forming an alloy of a solute element, such as copper, with tin in a lead/tin solder and providing a substantially uniform distribution of particles of the intermetallic compound in the solder. The concentration of the solute element is maintained at less than about three times the tin concentration and less than about 10% of the amount of the solder.

Electromigration lifetime increase of lead base alloys

Growing community of inventors

Stanfordville, NY, United States of America

James M Oberschmidt