Teledyne Instruments, Inc.

James M Camper

Tong Chen

William J Alvesteffer

A coriolis flow sensor is disclosed. The coriolis flow sensors comprises a first substrate layer, a second substrate layer, and a third substrate layer. The first substrate layer comprises a first wall. The second substrate layer comprises a second wall. The third substrate layer is disposed between the first and second substrate layers in a stacked configuration. The third substrate layer defines a flow path. The first and second walls of the respective first and second substrates and the flow path defined by the third substrate layer define a first flow channel configured to receive a fluid therethrough. A first actuator is configured to generate vibrations in the first flow channel. The first flow channel is mechanically moveable.

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Newport News, VA, United States of America

James M Camper