Nordson Corporation

James M Borsuk

Edward C McGhee

James C Smith

James Khoury

James W Schmitkons

Gregory W Harrell

Laurence B Saidman

James V Bachman

Jan L Shanaberger

Greg Harrell

Ed McGhee

Hallie Smith-Petee

A microwave excited ultraviolet lamp system with a data logging and retrieval circuit and method for operating the same. The data logging and retrieval circuit stores operational data in a cache memory using a FIFO data storage protocol. The contents of the cache memory are periodically copied to a larger removable memory so that the removable memory contains a relatively long historical record of the system operational parameters. The data logging and retrieval circuit includes a data port configured to load the contents of the cache memory into an external device when the device is coupled to the data port. A second data port allows the external device to supply power to the data logging and retrieval circuit so that data may be retrieved when the internal power supply is malfunctioning. Data stored in the removable memory may be protected so that it may only be accessed by authorized personnel.

Microwave excited ultraviolet lamp system with data logging and retrieval circuit and method

A system, method, and computer program product for optimizing the cooling of a UV bulb during a UV irradiation process is described. A power level in which to operate the UV bulb is received. In addition, a particular type of UV bulb being used in the UV irradiation process is received. Thereafter, at least one optimal UV cooling parameter that corresponds to the power level and the type of UV bulb is retrieved from a UV source parameters database. At least one control signal is then sent to a cooling device that is based on the retrieved optimal UV cooling parameter, and the control signal instructs the cooling device to cool the particular type of UV bulb according to the retrieved optimal UV cooling parameter during the UV irradiation process.

Microwave powered lamp with optimized cooling for different bulb chemistries

A UV system for irradiating a substrate includes a lamphead having an enclosure with an interior. A UV bulb is positioned in the interior and is capable of emitting UV energy when excited by RF energy. The UV system also includes a solid state RF source capable of generating the RF energy. The RF energy is transmitted to the UV bulb, which causes the UV bulb to ignite and emit the UV energy from the interior of the lamphead.

Ultraviolet systems and methods for irradiating a substrate

Embodiments of the invention provide an apparatus, method, and program product to control a lamp system. The apparatus comprises a plasma lamp bulb () and a microwave generator () operable to generate a microwave energy field to excite the plasma lamp bulb () to emit ultraviolet light (). The apparatus further comprises a sensor () to measure the intensity of the ultraviolet light () and a reflector () positioned between the plasma lamp bulb () and the sensor () The reflector () is operable to reflect at least a portion of the ultraviolet light () generated by the plasma lamp bulb (). The method comprises receiving a target intensity for the ultraviolet light () and measuring an intensity of the ultraviolet light () using a sensor (). The method further comprises comparing the target intensity to the measured intensity and, in response to the comparison, adjusting power to a microwave generator () to adjust the intensity of the ultraviolet light ().

Ultraviolet lamp system and method for controlling emitted ultraviolet light

Apparatus for generating ultraviolet light and methods of operating an ultraviolet light source. The apparatus may include a microwave chamber () enclosing an interior space, a light source () with a lamp head () coupled to the microwave chamber (), an ultraviolet (UV) transmissive member () positioned above the lamp face () and below the interior space to define a plenum () therebetween, and an exhaust system () coupled in fluid communication with the plenum. The lamp head () has a lamp face () through which ultraviolet light () and cooling air () are emitted. The UV transmissive member () is configured to transmit the ultraviolet light () into the interior space and to divert the cooling air () from the interior space. The exhaust system () configured to exhaust the cooling air () from the plenum ().

Lamp systems and methods for generating ultraviolet light

An apparatus for generating ultraviolet light and irradiating a 450 mm diameter semi-conductor wafer. The apparatus includes a plenum and an array of nine RF irradiator units coupled with the plenum. Each irradiator unit includes a plasma lamp bulb and an RF generator operable to generate a radiation energy field to excite the plasma lamp bulb and emit the ultraviolet light. The nine irradiator units are arranged in three rows with three of the irradiator units in each row.

Method and apparatus for irradiating a semi-conductor wafer with ultraviolet light

A microwave-excited ultraviolet lamp system includes a microwave chamber cooled with air drawn through the chamber by a negative pressure source. A filter provided at an inlet of the lamp system prevents particulate material from entering the microwave chamber.

Ultraviolet lamp system with cooling air filter

An apparatus () for generating ultraviolet radiation includes a pair of magnetrons () coupled to a longitudinally extending microwave chamber () for generating standing microwave energy waves within the chamber (). Microwave energy from the magnetrons () is directly coupled to the microwave chamber () without the use of coupling slots, antennas or other coupling structures. A longitudinally extending electrodeless plasma bulb () is mounted within the microwave chamber () and is operable to emit ultraviolet radiation () in response to excitation by the microwave energy generated by the pair of magnetrons (). The microwave chamber () includes a pair of longitudinally extending tuning walls () positioned on opposite sides of the plasma lamp bulb () and capable of overlapping the standing microwave energy waves generally along the longitudinal length of the plasma bulb ().

Apparatus and method for generating ultraviolet radiation

A microwave powered lamp head assembly includes a shutter assembly which may be activated to selectively allow transmission of light from the microwave powered lamp bulb. The shutter assembly allows unrestricted airflow when it is in the closed position so that the active lamp bulb may still be cooled, while preventing the transmission of UV radiation through the shutter. The shutter assembly is in close sealing relation with respect to the optical cavity holding the lamp bulb when in the closed position to minimize the escape of UV radiation.

Microwave powered lamphead having external shutter

Apparatus and method for treating a product with ultraviolet light. The apparatus includes a chamber having an inlet and an outlet, and an interior space between the inlet and the outlet. An ultraviolet light permeable conveyor is configured to move the product through the interior space from the inlet to the outlet. The conveyor has a top surface which receives the product and an opposite bottom surface. A source of ultraviolet light is coupled to the chamber and is configured to direct ultraviolet light in at least first and second portions within the interior space toward the conveyor. A first reflector is positioned in the interior space and above the top surface of the conveyor such that the first portion of the ultraviolet light is redirected toward the product on the top surface. A second reflector is positioned in the interior space and below the bottom surface of the conveyor such that the second portion of the ultraviolet light is redirected upwardly through the conveyor toward the product on the top surface.

Apparatus and method for treating products with ultraviolet light

An exhaust system for use with a microwave excited ultraviolet lamp system is provided to receive cooling air emitted from the lamp system and to contain and direct the cooling air so as not to contact a substrate being irradiated with ultraviolet light. A lens, such as a quartz lens, is supported by the exhaust duct to transmit the ultraviolet light emitted from the lamp system toward the substrate.

Exhaust system for a microwave excited ultraviolet lamp

A reflector ( ) for use in a microwave excited ultra-violet lamp system ( ) having a plasma lamp bulb ( ). The reflector ( ) includes a pair of longitudinally extending reflector panels ( ) that are mounted in opposing, i.e., mirror facing relationship, and in space relationship to the plasma lamp bulb ( ). A longitudinally extending intermediate member ( ) is mounted in spaced relationship to the pair of reflector panels ( ) and to the plasma lamp bulb ( ). The reflector panels ( ) and the intermediate member ( ) form a pair of longitudinally extending slots ( ) that are operable to pass air toward the plasma lamp bulb ( ) to envelop the bulb ( ) effectively entirely about its outer surface. Alternatively, the pair of reflector panels ( ) are connected to longitudinally extending edges ( ) of the intermediate member ( ). The intermediate member ( ) includes multiple apertures ( ) formed therethrough that are operable to pass air toward the bulb ( ) to envelope the bulb ( ) effectively entirely about its outer surface. A method of cooling a plasma lamp bulb ( ) in a microwave excited ultraviolet lamp system ( ) is also disclosed.

Microwave excited ultraviolet lamp system with improved lamp cooling

An electrostatic dispensing system for dispensing flowable liquid material onto a moving substrate. The electrostatic dispensing system includes multiple liquid dispensers that are aligned along a common axis and supported in spaced, non-contacting relationship on one side of the moving substrate. Each of the liquid dispensers includes a valve to control the flow of fluid through the dispenser. An electrostatic field generator is supported in spaced, non-contacting relationship on the opposite side of the moving substrate to generate an electrostatic field through the moving substrate. The electrostatic field operates to attract flowable liquid material from dispensing outlets associated with the multiple liquid dispensers as a series of spaced, continuous streams or beads which intersect a surface of the moving substrate facing the liquid dispensers. The beads of flowable material are deposited on the surface of the moving substrate in a series of uniform, continuous beads which are formed generally parallel to a direction of travel of the moving substrate. Methods of electrostatically dispensing flowable material onto a moving substrate are also disclosed.

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Westlake, OH, United States of America

James M Borsuk