Therma-wave, Inc.

The United States of America As Represented by the Department of Energy

Other

Kla-tencor Technologies Corporation

James Lee Hendrix

Joel Ng

David S Wang

David Y Wang

Michael A Ellison

Adam Eales Norton

David M Aikens

Conrad M Yu

Lawrence D Rotter

Robert Eugene Stoddard

Jackson C Koo

An optical filter for the selective attenuation of specific wavelengths of light includes at least one spectrally dispersive element, such as a diffraction grating or prism, in combination with an optical filter. A dispersive element separates broadband light into a constituent wavelength spread in angle space. An optical filter, or filter array, can block and/or attenuate specific wavelengths or wavelength ranges of interest while the light is angularly dispersed. A second dispersive element can recombine this filtered, separated wavelength fan of light into a coaxial broadband beam having a smoother intensity profile than the unfiltered beam.

Broadband wavelength selective filter

A combiner for optical beams includes a substrate overlaid by a multi-layer dielectric film stack. The substrate is a clear material and the dielectric film stack is a series of alternating layer of high and low refractive index. This gives the combiner relatively high reflectivity across UV wavelengths and relatively high transmissivity in the visible and longer wavelengths and allows visible light to pass through the combiner while UV light is reflected. At the same time dielectric film stack has minimal absorption and scatter. This means that the intensity of visible light maintains at least 90% of its intensity as it passes through combiner and UV light retains at least 90% of its intensity as it is reflected by combiner.

Beam splitter/combiner for optical metrology tool

A flat spectrum illumination source for use in optical metrology systems includes a first light source generating a visible light beam and a second light source generating an ultraviolet light beam. The illumination source also includes an auxiliary light source generating a light beam at wavelengths between the visible light beam and the ultraviolet light beam. The three light beams are combined to provide a broadband probe beam that has substantially even illumination levels across a broad range of wavelengths. Alternately, the illumination source may be fabricated as an array of light emitting diodes selected to cover a range of separate wavelengths. The outputs of the LED array are combined to produce the broadband probe beam.

Flat spectrum illumination source for optical metrology

Beam splitter/combiner for optical meterology tool

An integrated optical switch/amplifier with modulation capabilities comprises a semiconductor waveguide with an input end-face and an output end-face. The waveguide is disposed on a substrate and separated from it by an I-region. A laser cavity is fabricated transverse to the semiconductor waveguide and supports a bleed laser during operation. A pair of switching electrodes with one placed on top of the semiconductor waveguide and another placed beneath the substrate provide for a selective injection of electron carriers from a top length of the semiconductor waveguide and from the substrate through the I-region. Thus, an optical signal presented at the input end-face is either blocked, modulated, or amplified-through according to the relative polarity of voltages applied to the pair of switching electrodes.

Integrated optical switch/amplifier with modulation capabilities

A Porro prism and a light polarizer are combined in a single optical element termed a Hendrix Prism. The design provides retro-reflection of incoming light of a predetermined polarization in a direction anti-parallel to the direction of light incidence, while reflecting undesired light, i.e., that having a polarization orthogonal to the predetermined polarization, from the surface of the light polarizer. The undesired light is reflected in a direction that does not interfere with the intended operation of the device in which the Hendrix Prism is installed yet provides feedback to the system in which it is used.

Polarization selecting optical element using a porro prism incorporating a thin film polarizer in a single element

A laser initiated ordnance controller apparatus which provides a safe and m scheme with no moving parts. The safe & arm apparatus provides isolation of firing energy to explosive devices using a combination of polarization isolation and control through acousto-optical deviation of laser energy pulses. The apparatus provides constant monitoring of the systems status and performs 100% built-in-test at any time prior to ordnance ignition without the risk of premature ignition or detonation. The apparatus has a computer controller, a solid state laser, an acousto-optic deflector and RF drive circuitry, built-in-test optics and electronics, and system monitoring capabilities. The optical system is completed from the laser beam power source to the pyrotechnic ordnance through fiber optic cabling, optical splitters and optical connectors. During operation of the apparatus, a command is provided by the computer controller and, simultaneous with laser flashlamp fire, the safe & arm device is opened for approximately 200 microseconds which allows the laser pulse to transmit through the device. The arm signal also energizes the laser power supply and activates the acousto-optical deflector. When the correct fire format command is received, the acousto-optic deflector moves to the selected event channel, and the channel is verified to ensure the system is pointing to the correct position. Laser energy is transmitted through the fiber where an ignitor or detonator designed to be sensitive to optical pulses is fired at the end of the fiber channel. Simultaneous event channels may also be utilized by optically splitting a single event channel. The built-in-test may be performed anytime prior to ordnance ignition.

Growing community of inventors

Livermore, CA, United States of America

James Lee Hendrix