Input/output, Inc.

James L Marsh

Duli Yu

Howard D Goldberg

Arjun Selvakumar

Matthew W Ip

Martin Arnold Schmidt

Bing-Fai Fung

Philip Simon

W Marc Stalnaker

Lianzhong Yu

Peter Maxwell

Axel Michael Sigmar

Lawrence Philip Behn

Thomas M Buie

Guido Lemke

Klaus Domagalski

David Morgan

Kees Faber

Sjoerd Altman

Richard Laroo

Larry Rushefsky

Ray Rinne

Demetrios Balderes

An accelerometer () for measuring seismic data. The accelerometer () includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer () also includes a top cap press frame recess () and a bottom cap press frame recess () for isolating bonding pressures to specified regions of the accelerometer (). The accelerometer () is vacuum-sealed and includes a balanced metal pattern () to prevent degradation of the performance of the accelerometer (). A dicing process is performed on the accelerometer () to isolate the electrical leads of the accelerometer (). The accelerometer () further includes overshock protection bumpers () and patterned metal electrodes to reduce stiction during the operation of the accelerometer ().

Sensor design and process

A sensor apparatus () includes a plural different spatial direction axis of sensitivity positioned sensor package containing sensor module () supported by a planar surface () within a cavity () of a housing () coupled to a first end cap () by a PC-board connection (). Housing () is further coupled to first end cap () by a first coupling member () and a second coupling member () and is also coupled to an opposite second end cap () by a third coupling member () and a fourth coupling member (). Interface sealing members () seal between housing () and first end cap (). Interface sealing members () seal between housing () and second end cap ().

Integrated and multi-axis sensor assembly and packaging

A system for resiliently attaching a mass to a package. The system includes a mass, a housing, resilient couplings for resiliently attaching the mass to the housing, bumpers for slidingly supporting the mass, and electrical connections for electrically coupling the mass to the housing.

Low stress die attachment

Growing community of inventors

San Antonio, TX, United States of America

James L Marsh