Rosemount Aerospace Limited

James Joseph Mctighe

Magdi A Essawy

Cuong Tho Huynh

Donald R Singh

Christopher Sanden

Weibin Zhang

Ben Ping-Tao Fok

Ben Pingtao Fok

A pressure sensor includes a MEMS pressure transducer with a pressure sensing diaphragm and sensor elements, an isolator diaphragm spaced apart from the pressure sensing diaphragm, and a ceramic header body. The ceramic header body has an electrical conductor and transducer aperture with the MEMS pressure transducer supported therein. The isolator diaphragm is coupled to the to the MEMS pressure transducer by a fluid and is sealably fixed to the ceramic body. The ceramic header body bounds the fluid and the electrical conductor electrically connects the MEMS pressure transducer with the external environment. Differential pressure sensors and methods of making pressure sensors are also described.

Differential MEMS pressure sensors with a ceramic header body and methods of making differential MEMS pressure sensors

A probe system configured to receive a radio-frequency (RF) signal from a radio-frequency (RF) antenna includes a heater and a control circuit. The heater includes a resistive heating element routed through the probe system. An operational voltage is provided to the resistive heating element to provide heating for the probe system and the resistive heating element has an element capacitance. The control circuit is configured to determine an antenna response of the resistive heating element and determine a remaining useful life of the probe system based on the antenna response over time.

Probe heater remaining useful life determination

A probe system includes a heater and a control circuit. The heater includes a resistive heating element routed through the probe system. An operational voltage is provided to the resistive heating element to provide heating for the probe system. The control circuit is configured to provide the operational voltage and monitor a circuit frequency based on an element capacitance between the resistive heating element and a metallic sheath of the heater over time. The control circuit is further configured to determine remaining useful life of the probe system based on the circuit frequency.

A capacitive pressure sensor may be configured to transduce both a dynamic pressure and a static pressure using a single diaphragm. A capacitive pressure sensor may comprise a dynamic excitation signal module in parallel with a static excitation signal module, a summing amplifier module in connection with both the dynamic excitation module and the static excitation module, a dynamic charge amplifier stage in a parallel with a static charge amplifier stage, and a capacitive sensor connected to an output of the summing amplifier module, as well as an input of the dynamic charge amplifier stage, and an input of the static charge amplifier stage. Further, a dynamic excitation signal may be provided by the dynamic excitation signal module as a constant DC voltage signal, and a static excitation signal may be provided by the static excitation signal module as an AC voltage signal.

Capacitive static and dynamic sensor

A hardware-only contactless position sensor system is provided that includes a contactless position sensor and hardware-only sensor system electronics. The sensor includes excitation, sine, and cosine coils. The electronics are coupled to the sensor and detect a position of a target relative to the sensor. The electronics include a phase shift and summation circuit that applies a phase shift at a frequency of the excitation coil to one of a sine signal from the sine coil or a cosine signal from the cosine coil as a phase shifted signal and add the phase shifted signal with an unshifted instance of the cosine or sine signal to produce a phase shifted output. The electronics also include a phase detector circuit that detects a phase of the phase shifted output and generate an output voltage corresponding to the phase and proportional to the position of the target.

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Burnsville, MN, United States of America

James Joseph Mctighe